Preliminary Experimental Study on the Resolution of the Optical-electro Imaging System at 30.4 nm

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Quantum Electronics >Volume 20 >Issue 4 >Page 501 > Article

Chinese Journal of Quantum Electronics
Vol. 20, Issue 4, 501 (2003)

Preliminary Experimental Study on the Resolution of the Optical-electro Imaging System at 30.4 nm

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preliminary Experimental Study on the Resolution of the Optical-electro Imaging System at 30.4 nm[J]. Chinese Journal of Quantum Electronics, 2003, 20(4): 501 Copy Citation Text

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Abstract

An imaging system based on MCP (MicroChannel plate) detector is designed to image the extreme ultraviolet (EUV) light at 30.4 nm. The image of a 3 mm-width-slit is obtained by this imaging system. Its spatial resolution of 490 μm is demonstrated. Moreover, all kinds of factors influencing the resolution of the imaging system and the measures to improve the resolution are analyzed in this paper.

Keywords

extreme ultraviolet laser-produced plasma MCP microchannel plate monochromator

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