Dongsheng Liu, Xu Liang, Ying Lin, Yifan Xu, Xiaodong Fang. Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20210022
- Infrared and Laser Engineering
- Vol. 50, Issue 11, 20210022 (2021)
Fig. 1. Typical discharge excitation loop
Fig. 2. Simulation model of a typical discharge excitation loop
Fig. 3. Waveform of cavity equivalent resistance voltage and discharge capacitor voltage
Fig. 4. Simulation model of discharge excitation circuit with 3-level PFN structure
Fig. 5. Simulation waveform of 3-level PFN structure
Fig. 6. Simulation model of discharge excitation circuit with 4-level PFN structure
Fig. 7. Simulated waveform of impedance mismatch of 4-level PFN structure
Fig. 8. Adjusted simulation waveform of 4-level PFN structure
Fig. 9. Schematic diagram of long pulse width laser structure
Fig. 10. Waveform of measured voltage and optical pulse width
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Table 1. Pulse width with different peaking capacitance values
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Table 2. Pulse width for different peaking inductance values
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Table 3. Experimental data of different laser pulse widths
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