• Journal of Infrared and Millimeter Waves
  • Vol. 23, Issue 1, 64 (2004)
[in Chinese]1, [in Chinese]1、2, [in Chinese]1, [in Chinese]3, and [in Chinese]2、4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. FABRICATION OF VANADIUM OXIDES POLYCRYSTALLINE THIN FILM FOR UNCOOLED IR DETECTORS[J]. Journal of Infrared and Millimeter Waves, 2004, 23(1): 64 Copy Citation Text show less
    References

    [1] Rozgonyi G A, Hensler D H. Structure and electrical properties of vanadium dioxide thin films[J]. J. Vac. Sci. Technol., 1968, 5(6): 194-199

    [2] DeNatale J F, Wood P J, Harker A B. Formation and characterization of grain-oriented VO2 thin films[J]. J. App. Phys., 1989, 66(12): 5844-5850

    [3] Ermine H, Picard F, Vincent D. Vanadium oxide films forms for optical switching and detection[J]. Opt. Eng., 1993, 32(9): 2092-2099

    [4] Burdis M S. Properties of sputtered thin films of vanadium-titanium oxide for use in electrochromic windows[J]. Thin Solid Films, 1997, 311: 286-298

    [6] Chen Changhong, Yi Xinjian, Zhang Jing. Linear uncooled microbolometer array based on VOx thin film[J] .Infrared Phys Technol, 2001, 42(2): 87-90

    [7] Case F C. Modifications in the phase transition properties of pre-deposited VO2 films[J] .J. Vac. Sci. Technol., 1984, A2(4): 1509-1512

    [8] Hanlon T J, Walker R E, Coath J A. Comparison between vanadium dioxide coating on glass on produced by sputtering, alkoxide and aqueous sol-gel methods[J]. Thin Solid Films, 2002, 405: 234-237

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. FABRICATION OF VANADIUM OXIDES POLYCRYSTALLINE THIN FILM FOR UNCOOLED IR DETECTORS[J]. Journal of Infrared and Millimeter Waves, 2004, 23(1): 64
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