Development of CMOS Optical Color Modulation Films for Low-Light-Level Systems

Jing Zhang; Yubo Sun; Xiuhua Fu; Dongmei Liu; Yining Mu; Shuang Li

doi:10.3788/LOP57.093101

Journals >Laser & Optoelectronics Progress >Volume 57 >Issue 9 >Page 093101 > Article

Laser & Optoelectronics Progress
Vol. 57, Issue 9, 093101 (2020)

Development of CMOS Optical Color Modulation Films for Low-Light-Level Systems

Jing Zhang^1、**, Yubo Sun^1、*, Xiuhua Fu¹, Dongmei Liu¹, Yining Mu², and Shuang Li³

Author Affiliations

¹College of Photoelectric Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China

²College of Science, Changchun University of Science and Technology, Changchun, Jilin 130022, China

³Optorun (Shanghai) Co., Ltd., Shanghai 200444, China

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DOI: 10.3788/LOP57.093101 Cite this Article Set citation alerts

Jing Zhang, Yubo Sun, Xiuhua Fu, Dongmei Liu, Yining Mu, Shuang Li. Development of CMOS Optical Color Modulation Films for Low-Light-Level Systems[J]. Laser & Optoelectronics Progress, 2020, 57(9): 093101 Copy Citation Text

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Fig. 1. Visual response curves of mantis shrimp

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Fig. 2. Six primary colors' spectrum band distribution

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Fig. 3. Arrangement diagram of the optical color modulation film

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Fig. 4. Design curves of the optical color modulation film. (a) Red; (b) orange; (c) yellow; (d) green; (e) cyan; (f) blue

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Fig. 5. Test curves of the optical color modulation film. (a) Red; (b) orange; (c) yellow; (d) green; (e) cyan; (f) blue

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Parameter	Specification
Substrate	SiO₂
Spectrum range /nm	380-800
Bandwidth /nm	50(red),70(orange),120 (yellow), 50 (green)120 (cyan), 200 (blue)
Central wavelength /nm	726 (red), 672(orange),618(yellow), 564 (green),510(cyan), 455 (blue)

Table 1. Specifications of the optical color modulation film

Material	Depositionrate /(nm·s^-1)	Temperature /℃	Vacuumdegree /(10^-3Pa)
Ti₃O₅	0.35	120	2.0
SiO₂	0.60	120	2.0

Table 2. Evaporation process parameters of Ti₃O₅ and SiO₂

Material	Voltage /V	Current /mA	ACC /V	$\begin{matrix} \frac{E}{B} \end{matrix}$ /%	Volume flux /(mL·min^-1)
Material	Voltage /V	Current /mA	ACC /V	$\begin{matrix} \frac{E}{B} \end{matrix}$ /%	Gas1	Gas2	Gas3
Ti₃O₅	1400	1400	800	150	75	10	12
SiO₂	1200	1200	600	150	60	0	12

Table 3. Parameter table of ion source

Parameter	Red	Orange	Yellow	Green	Cyan	Blue
Peak transmittance /%	89.93	94.06	93.76	89.93	93.45	94.71
Bandwidth /nm	51	76	118	57	130	200
Central wavelength /nm	728	668	613	570	505	459

Table 4. Specifications of test results

Type of optical colormodulation film	Thickness /nm	Stress /MPa
Red	3452.95	45
Orange	2988.20	39
Yellow	2182.17	84
Green	2244.45	80
Cyan	1659.24	79
Blue	1511.44	69

Table 5. Stress of the optical color modulation film

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