You Gao, Tuo Liu, Siyu Wang, Hairun Guo. Fabrication and optical frequency comb generation in high-quality factor silicon oxide microcavity (Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220294
- Infrared and Laser Engineering
- Vol. 51, Issue 5, 20220294 (2022)
Fig. 1. Fabrication of microcavity. (a) Schematic diagram of SiO2 micro-cavity preparation; (b) Picture of SiO2 crystalline resonator
Fig. 2. Morphology of microcavity. (a) 3D surface profile of the microcavity; (b) Surface roughness diagram of microcavity; (c)-(d) Characterization of microcavity roundness
Fig. 3. Measurement of resonant peak of SiO2 microcavity. (a) Schematic diagram of microcavity coupling test; (b) Power transmission spectrum of microcavity; (c) Lorentz fitting spectral line; (d) Ringdown fitting
Fig. 4. Coupling characteristics of microcavity
Fig. 5. Decay curve of microcavity Q value with time
Fig. 6. Optical frequency comb generation. (a) Transmission lines of microcavity at high pump power；(b) Partially amplified transmission line of Fig.(a); (c)-(e) Evolution process of optical frequency comb corresponds to three different positions of microcavity transmission line in Fig.(a)
Fig. 7. Simulated optical frequency comb evolution based on LLE. (a) Figures I, II，III and IV show the evolution process of optical frequency comb; (b) Corresponding to the time-domain spectra in different comb states in Fig.(a)
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Table 1. Change of Q value of microcavity before and after annealing
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