• Acta Optica Sinica
  • Vol. 40, Issue 19, 1931002 (2020)
Haojie Li1、2 and Yan Zhang1、*
Author Affiliations
  • 1Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • show less
    DOI: 10.3788/AOS202040.1931002 Cite this Article Set citation alerts
    Haojie Li, Yan Zhang. Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate[J]. Acta Optica Sinica, 2020, 40(19): 1931002 Copy Citation Text show less

    Abstract

    Full composition range AlGaN refers to AlGaN with an Al composition of 0-1. In this paper, the composition is introduced into the complex refractive index of AlGaN, and a complex refractive index formula for full composition AlGaN is established in the spectral range of 200-800 nm. The optical parameters of sapphire are obtained by ellipsometry and verified by the transmission spectrum. The complex refractive index formula and the multilayer optical film filter model are used to study the transmission spectra of the multilayer AlGaN samples on sapphire substrates. The effect of each film on the transmission spectra of samples and the possible shift of an actual structure caused by the process are analyzed, and a fast analysis method is thus proposed for the transmission spectra of multilayer films.
    Haojie Li, Yan Zhang. Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate[J]. Acta Optica Sinica, 2020, 40(19): 1931002
    Download Citation