Guanqun Yu, Lü Baiying, Yue Xu, Zhongming Zeng, Dongmin Wu. Exposure Time Optimization of Laser Interference Direct Writing Device Based on MEMS Micromirror[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0914002

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- Laser & Optoelectronics Progress
- Vol. 61, Issue 9, 0914002 (2024)
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