Study on a new and rapid heat-treatment process for fabricating lead zirconate titanate thin film

[in Chinese]; [in Chinese]

[1] Myers, Susmita Bose, Amit Bandyopadhyay, et al. Micromachining of PZT MEMS[J]. Am. Ceram. Soc. , 2003,82: 30-35

[2] Jenkins D F L, Clegg W W, Cattan E, et al. PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS[J]. Journal of Electroceramics, 2001,7:5-11

[3] Scott J, Paz C. De Araujo. Pyroelectric Devices and Materials[J]. Rep. Phys, 1986, 49:1335-1386

[4] Burill L A, Brook K G. Crystallization of sol-gel derived lead-zirconate-titanate thin films in argon and oxygen atmospheres[J]. Appl. Phys. , 1994, 75(9): 4501-4509

[5] Zeng Jianming, Song Shigeng, Wang Lianwei, et al. Sol-gel Preparation of Pb( Zr0. 5Ti0.5 )O3 Ferroelectric Thin Films Using Zirconium Oxynitrate as the Zirconium Source[J]. Am.Ceram. Soc. , 1999, 82:461-466

[7] Weiguo Liu, Jong Soo Ko, Weiguang Zhu. Preparation and properties of multilayer Pb( Zr, Ti ) O3/PbTiO3 thin films for pyroelectric application [ J ]. Thin Sold Films, 2000, 371:254-258

[8] Song Zhitang, Wei Ren, Wang Shixin. Structural and abnormal electrical properties of excess PbO-doped lead lanthanum titanate thin films [ J ]. Phys. D: Appl. Phys. , 2000,33: 764-772

[9] Tomita Katsuhiko, Takamuro Daisuke, Samada Kazuaki. Electron emission type infrared imaging sensor using ferroelectric thin plate [J]. Sensors and Actuator A, 2002, 98:147-152