• Laser & Optoelectronics Progress
  • Vol. 59, Issue 19, 1900009 (2022)
Yu Wang1, Bo Xia1、2、*, Lulu Wan1, and Chunyang Li1
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Shihezi University, Shihezi 832003, Xinjiang, China
  • 2Industrial Technology Research Institute, XPCC, Shihezi 832003, Xinjiang, China
  • show less
    DOI: 10.3788/LOP202259.1900009 Cite this Article Set citation alerts
    Yu Wang, Bo Xia, Lulu Wan, Chunyang Li. Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900009 Copy Citation Text show less

    Abstract

    Femtosecond laser-assisted chemical etching technology has unique advantages in high quality, high depth to diameter ratio and high controllability of microporous processing, which provides a new way and method for the preparation of microporous. It has great application potential in micro total analysis system, three-dimensional optical flow control system in optical fiber and resonator manufacturing. In this paper, the research progress of femtosecond laser-assisted chemical etching for transparent media materials in recent years is reviewed, including the effect of femtosecond laser-modified zone on etching rate, the effect of strong acid and strong alkali chemical solution on etching effect, the optimization of chemical etching process, and the application of femtosecond laser-assisted chemical etching. The challenges faced by femtosecond laser-assisted chemical etching of microchannels, structure processing mechanism, and technology are summarized, and the research focus in the future is prospected.
    Si-O-Si+H+F-Si-OH+SiF
    SiO2+2OH- SiO2(OH)22-
    Da=kCn-1L2D
    λ=RTπ2σ2NaP=1.21 μm
    D=4r3 2RTπM=10-3 m2/s
    Yu Wang, Bo Xia, Lulu Wan, Chunyang Li. Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900009
    Download Citation