• Laser & Optoelectronics Progress
  • Vol. 59, Issue 19, 1900009 (2022)
Yu Wang1, Bo Xia1、2、*, Lulu Wan1, and Chunyang Li1
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Shihezi University, Shihezi 832003, Xinjiang, China
  • 2Industrial Technology Research Institute, XPCC, Shihezi 832003, Xinjiang, China
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    DOI: 10.3788/LOP202259.1900009 Cite this Article Set citation alerts
    Yu Wang, Bo Xia, Lulu Wan, Chunyang Li. Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900009 Copy Citation Text show less

    Abstract

    Femtosecond laser-assisted chemical etching technology has unique advantages in high quality, high depth to diameter ratio and high controllability of microporous processing, which provides a new way and method for the preparation of microporous. It has great application potential in micro total analysis system, three-dimensional optical flow control system in optical fiber and resonator manufacturing. In this paper, the research progress of femtosecond laser-assisted chemical etching for transparent media materials in recent years is reviewed, including the effect of femtosecond laser-modified zone on etching rate, the effect of strong acid and strong alkali chemical solution on etching effect, the optimization of chemical etching process, and the application of femtosecond laser-assisted chemical etching. The challenges faced by femtosecond laser-assisted chemical etching of microchannels, structure processing mechanism, and technology are summarized, and the research focus in the future is prospected.
    Yu Wang, Bo Xia, Lulu Wan, Chunyang Li. Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900009
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