Huajiang Yuan, Chonglei Sun, Jia Zhao. High-Speed Hetero-Doped Silicon-Based Slot Waveguide Modulator[J]. Acta Optica Sinica, 2023, 43(7): 0723002
- Acta Optica Sinica
- Vol. 43, Issue 7, 0723002 (2023)
Fig. 1. Modulator structure with a single-drive push-pull electrode
Fig. 2. Cross section of modulator with heteromorphic doped slot waveguide
Fig. 3. Normalized fundamental optical mode distribution in slot waveguide
Fig. 4. Carrier distribution on pn junction cross section at 0 V and 2 V. (a) 0 V; (b) 2 V
Fig. 5. Optical transmission loss and phase shift under different bias voltages. (a) Optical transmission loss; (b) phase shift
Fig. 6. Junction capacitance at different bias voltages
Fig. 7. T-shape electrode structure (W=50 μm, T=12 μm, dgap=15 μm, P=90 μm) and equivalent circuit model of the loaded transmission line. (a) Electrode structure; (b) equivalent circuit model
Fig. 8. Simulated value of electrode equivalent circuit. (a) Capacitance per unit length; (b) inductance per unit length; (c) resistance per unit length; (d) loss per unit length
Fig. 9. Electrode impedance and refractive index with unloaded and loaded pn junction. (a) Impedance; (b) refractive index
Fig. 10. Electrode loss and 3 dB electro-optic bandwidth under different bias voltages. (a) Electrode loss; (b) electro-optic bandwidth
Fig. 11. Optical transmission spectra and modulation efficiency of 3 mm long modulator under different bias voltages. (a) Optical transmission spectra; (b) modulation efficiency
Fig. 12. 70 Gbit/s OOK modulation eye diagrams with Vpp=2 V. (a) Slot WG; (b) traditional rib WG
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