Fully reconfigurable silicon photonic MEMS microring resonators for DWDM

Ye Lu; Yinpeng Hu; Qian Ma; Yunzhi Liu; Jiayue Zhu; Huan Li; Daoxin Dai

doi:10.1364/PRJ.545740

Journals >Photonics Research >Volume 13 >Issue 5 >Page 1353 > Article

Photonics Research
Vol. 13, Issue 5, 1353 (2025)

Fully reconfigurable silicon photonic MEMS microring resonators for DWDM

Ye Lu¹, Yinpeng Hu¹, Qian Ma¹, Yunzhi Liu¹..., Jiayue Zhu¹, Huan Li^1,2,4,* and Daoxin Dai^1,2,3,5,*|Show fewer author(s)

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, Center for Optical & Electromagnetic Research, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou 310058, China

²Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, China

³Ningbo Research Institute, Zhejiang University, Ningbo 315100, China

⁴e-mail: lihuan20@zju.edu.cn

⁵e-mail: dxdai@zju.edu.cn

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DOI: 10.1364/PRJ.545740 Cite this Article Set citation alerts

Ye Lu, Yinpeng Hu, Qian Ma, Yunzhi Liu, Jiayue Zhu, Huan Li, Daoxin Dai, "Fully reconfigurable silicon photonic MEMS microring resonators for DWDM," Photonics Res. 13, 1353 (2025) Copy Citation Text

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(a)–(c) 3D image of the MEMS tunable all-pass microring resonator, add-drop microring resonator, and add-drop double-ring resonator. (d)–(f) Schematic of the MEMS tunable all-pass microring resonator, add-drop microring resonator, and add-drop double-ring resonator. (g) Schematic of slab-support structures. (h), (i) Schematic of tether-support structures.

Fig. 1. (a)–(c) 3D image of the MEMS tunable all-pass microring resonator, add-drop microring resonator, and add-drop double-ring resonator. (d)–(f) Schematic of the MEMS tunable all-pass microring resonator, add-drop microring resonator, and add-drop double-ring resonator. (g) Schematic of slab-support structures. (h), (i) Schematic of tether-support structures.

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(a) Tether-support phase shifter. (b) Slab-support phase shifter. (c) Displacement simulation of the tether-support phase shifter. (d) Displacement simulation of the slab-support phase shifter. (e) Effective index of the tether-support phase shifter. (f) Effective index of the slab-support phase shifter.

Fig. 2. (a) Tether-support phase shifter. (b) Slab-support phase shifter. (c) Displacement simulation of the tether-support phase shifter. (d) Displacement simulation of the slab-support phase shifter. (e) Effective index of the tether-support phase shifter. (f) Effective index of the slab-support phase shifter.

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Fig. 3. (a) Tether-support tunable coupler. (b) Slab-support tunable coupler. (c) Displacement simulation of the tether-support tunable coupler. (d) Displacement simulation of the slab-support tunable coupler. (e) Effective index of the tether-support tunable coupler. (f) Effective index of the slab-support tunable coupler.

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Fig. 4. (a) Simplified model for determining phase-shifting length. (b) Δφ with respect to κ under the different width differences Δw.

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$(a) Simplified model for the AD-DMRR resonance-tuning simulation. (b) Schematic of resonance tuning based on the Vernier effect. (c) The mapping between the target wavelength for tuning and the required refractive index change for different resonant modes of each single ring. (d) This simulation image shows the effect of dispersion and gap on the effective refractive index of the slab-support phase shifter. (e) Simulated transmission spectrum at the drop port of the AD-DMRR. In (c) and (d), the highlighted points of the same color correspond to each other, indicating that they represent related Δn and n(λt,gr) from the same tuning operation. The horizontal dashed lines in the figures denote the supposed target wavelengths intended to be achieved through tuning.$

Fig. 5. (a) Simplified model for the AD-DMRR resonance-tuning simulation. (b) Schematic of resonance tuning based on the Vernier effect. (c) The mapping between the target wavelength for tuning and the required refractive index change for different resonant modes of each single ring. (d) This simulation image shows the effect of dispersion and gap on the effective refractive index of the slab-support phase shifter. (e) Simulated transmission spectrum at the drop port of the AD-DMRR. In (c) and (d), the highlighted points of the same color correspond to each other, indicating that they represent related Δn and n(λt,gr) from the same tuning operation. The horizontal dashed lines in the figures denote the supposed target wavelengths intended to be achieved through tuning.

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Fig. 6. (a) Simulation for transmission of drop port of the AD-DMRR; (b) FDTD simulation for Krr.

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Fig. 7. (a) SEM top view and (b) magnified view of the MEMS tunable all-pass microring resonator. (c) Line shape changes versus VTC. (d) Resonant wavelength changes versus VPS.

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Fig. 8. (a) SEM top view and (b) magnified view of the MEMS tunable add-drop microring resonator. (c) Resonance changes versus VPS voltage. (d)–(g) FWHM at through port versus voltage configuration. (h)–(k) FWHM at drop port versus voltage configuration.

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Fig. 9. (a) SEM top view of the MEMS tunable add-drop double-ring resonator. (b) Flat-top characteristics of the line shape; (c) resonance shift of the AD-DMRR’s drop port at various voltage combinations. The gray background indicates the region where the resonance is continuously tunable.

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Fig. 10. (a) Schematic of the measurement setup. (b) Measured structure. (c) Square wave signal and its optical response. (d) Enlarged plot for the optical fall edge. (e) Enlarged plot for the optical rise edge.

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Reference	Type^a	Tunability	Resonance Tuning Range^b (nm)	FSR (nm)	Loaded Q	FWHM (nm)	${ER}_{t}$ (dB)	${IL}_{d}$ (dB)	Response Time (μs)
This work	AP	Resonance Coupling	7	7	3750	0.4	26	/	$\sim 5.4$
This work	AD	Resonance Coupling	3.5	3.5	3500	0.5	26	5	$\sim 5.4$
This work	DR	Resonance Coupling	19.4 discretely	34	/	0.23	/	4	$\sim 5.4$
[21]	AD	Coupling	/	4^c	15,500	0.1	20	/	/
[22]	AD	Coupling	/	5.15	77,500	0.02	21.8	1.5	/
[23]	AD	Coupling	/	10	12,019	0.17	8.8	/	/
[24]	AP	Resonance	21^b	21	1700	0.89	8	/	/
[25]	AD	Resonance	0.53	1.2	10,000	0.16	7	8	/
[26]	AD	Coupling	/	5.1	5000	0.3	20	7	/
[27]	AP	Resonance Coupling	3^b	3^c	3700	0.4	8	/	/
[28]	AD	Resonance Coupling	0.15	4.2	25,000	0.06	30	4	216 kHz^d
[29]	DR	Resonance Coupling	$\sim 0.5$ ^c	$\sim 0.5$ ^c	120,000	0.013	25	$\sim 7.5$ ^c	5.8
[30]	DR	Resonance Coupling	$\sim 0.5$ ^c	$\sim 0.5$ ^c	100,000	0.016	30	$\sim 7.5$ ^c	/

Table 1. Performance Comparison of Silicon Photonic MEMS Ring Resonators

Ye Lu, Yinpeng Hu, Qian Ma, Yunzhi Liu, Jiayue Zhu, Huan Li, Daoxin Dai, "Fully reconfigurable silicon photonic MEMS microring resonators for DWDM," Photonics Res. 13, 1353 (2025)

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