• Photonics Research
  • Vol. 13, Issue 5, 1353 (2025)
Ye Lu1, Yinpeng Hu1, Qian Ma1, Yunzhi Liu1..., Jiayue Zhu1, Huan Li1,2,4,* and Daoxin Dai1,2,3,5,*|Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Extreme Photonics and Instrumentation, Center for Optical & Electromagnetic Research, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou 310058, China
  • 2Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, China
  • 3Ningbo Research Institute, Zhejiang University, Ningbo 315100, China
  • 4e-mail: lihuan20@zju.edu.cn
  • 5e-mail: dxdai@zju.edu.cn
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    DOI: 10.1364/PRJ.545740 Cite this Article Set citation alerts
    Ye Lu, Yinpeng Hu, Qian Ma, Yunzhi Liu, Jiayue Zhu, Huan Li, Daoxin Dai, "Fully reconfigurable silicon photonic MEMS microring resonators for DWDM," Photonics Res. 13, 1353 (2025) Copy Citation Text show less

    Abstract

    Reconfigurable silicon microrings have garnered significant interest for addressing challenges in artificial intelligence, the Internet of Things, and telecommunications due to their versatile capabilities. Compared to electro-optic (EO) and thermo-optic (TO) devices, emerging micro-electromechanical systems (MEMS)-based reconfigurable silicon photonic devices actuated by electrostatic forces offer near-zero static power consumption. This study proposes and implements novel designs for fully reconfigurable silicon photonic MEMS microrings for high-speed dense wavelength division multiplexing (DWDM) elastic networks. The designs include an all-pass microring with a 7 nm free spectral range (FSR) and full-FSR resonance tuning range, an add-drop microring with a 3.5 nm FSR and full-FSR tuning range, and an add-drop double-microring with a 34 nm FSR, wide-range discrete resonance tunability, and flat-top tunability. These advancements hold promise for practical applications.
    Fx=12CxV2=kxx,

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    [cos(β0z)jΔβ2β0sin(β0z)jκβ0sin(β0z)jκβ0sin(β0z)cos(β0z)+jΔβ2β0sin(β0z)]·ej(β1+β22)z,

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    K=(κβ0sin(β0z))2,

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    φ=angle(cos(β0z)jΔβ2β0sin(β0z)).

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    [1KejφjKjK1Kejφ]·ej(β1+β22)z.

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    K=sin2(κz).

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    FWHMAP=(1tα)·FSRAPπtα,

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    FWHMAD=(1t1t2α)·FSRADπt1t2α,

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    Ltc=arcsin1tmin2κ(λmin).

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    (n(λ0,g0)+Δn)Lps+(n(λ0,)+nλΔλ)(LLps)=m(λ0+Δλ),

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    Lps=ng(λ0,)ΔλLΔnλ0+(ng(λ0,)n(λ0,))Δλ,

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    LpsFSR=λ02Δnλ0+(ng(λ0,)n(λ0,))·FSR.

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    FSReff=nFSR1=mFSR2m,  nN,

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    Δn=((LLps1)ng(λ0,)+n(λ0,))Δλλ0.

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    Ye Lu, Yinpeng Hu, Qian Ma, Yunzhi Liu, Jiayue Zhu, Huan Li, Daoxin Dai, "Fully reconfigurable silicon photonic MEMS microring resonators for DWDM," Photonics Res. 13, 1353 (2025)
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