Based on the study on femtosecond laser interaction with metal materials,with different laser operating parameters,micro-arrays pores are processed on aluminum foil with femtosecond laser. The relationship between the aperture of aluminum foil processing micro-arrays pores and the laser parameter is studied. Origin7.0 and SPSS 13.0 are used to analyse experimental data by graphs. The influences of femtosecond laser pulse number,pulse width,single pulse energy on the aperture sizes are indication.