Fig. 1. Unit structural diagram of THz MM absorber based on three-dimensional SRR array and microfluidic channel

Fig. 2. Structural diagram and size identification of three-dimensional metallic SRR

Fig. 3. Simulated absorption characteristic curve of THz MM absorber

Fig. 4. Resonance frequency shift when refractive index of liquid-phase analyte changes from n=1 to n=1.8 and linear fitting result

Fig. 5. Electric field distribution and magnetic field distribution at resonance frequency.(a) Electric field distribution; (b) magnetic field distribution

Fig. 6. Electric field distribution of y=0 cross section at resonance frequency and magnetic field distribution of x=0 cross section at resonance frequency. (a) Electric field distribution of y=0 cross section at resonance frequency; (b) magnetic field distribution of x=0 cross section at resonance frequency

Fig. 7. Change of refractive index frequency sensitivity of sensor when height of microfluidic channel increases from 32.7 μm to 33.5 μm

Fig. 8. Change of refractive index frequency sensitivity when thickness of covering dielectric layer increases from 0.10 μm to 0.40 μm

Table 1. Comparison of performance of THz MM absorber sensor based on three-dimensional SRR array and microfluidic channel with sensors reported in references