Xue ZHENG, Rui JIANG, Qian LI, Weizhe WANG, Zhimou XU, Jing PENG. Research on Anodic Aluminum Oxide Nanostructured LEDs [J]. Journal of Inorganic Materials, 2020, 35(5): 561
- Journal of Inorganic Materials
- Vol. 35, Issue 5, 561 (2020)
1. Schematic of the fabrication process of nanostructured LED chip
2. SEM images of the AAO membrane which pore widening by increasing etching time and calculated scale distribution of the pore diameter in (a1-a4)
3. Curve of the pore diameter with the etching time (a) and curve of the etching rate with the pore diameter (b)
4. SEM images of nanostructured LED chip
5. PL spectra of nanostructured LEDs with different pore diameter (a) and different depths (b)
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Table 1. Parameters of the ICP etching
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Table 2. Statistics of pore diameter and etching rate with ICP etching for different durations
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