• Journal of Inorganic Materials
  • Vol. 35, Issue 5, 561 (2020)
Xue ZHENG1, Rui JIANG1, Qian LI1, Weizhe WANG1, Zhimou XU1、*, and Jing PENG2
Author Affiliations
  • 1School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2College of Sciences, Wuhan University of Science and Technology, Wuhan 430081, China
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    DOI: 10.15541/jim20190246 Cite this Article
    Xue ZHENG, Rui JIANG, Qian LI, Weizhe WANG, Zhimou XU, Jing PENG. Research on Anodic Aluminum Oxide Nanostructured LEDs[J]. Journal of Inorganic Materials, 2020, 35(5): 561 Copy Citation Text show less

    Abstract

    LED has the advantages of high efficiency, energy saving and environmental protection. It is widely used in the field of lighting. Improving the luminous efficiency of LED has always been a research difficulty and hot spot in this field. To reduce the total reflection phenomenon between GaN material and air and to improve the light extraction efficiency, fabrication and properties of the anodized aluminum oxide (AAO) nanostructured LED device were studied. Through inductively coupled plasma (ICP) etching process, large-area ordered pore nanostructure arrays were successfully fabricated on the surface of p-GaN layer, and the quasi-photonic crystal structure with apertures of 250-500 nm and pore depths of 50-150 nm were obtained. The crystal structure greatly increases the luminous intensity of the LED, and the nano-array LED with pore diameter of 400 nm and depth of 150 nm is improved by 3.5 times in contrast to the LED without the nano-array.
    Xue ZHENG, Rui JIANG, Qian LI, Weizhe WANG, Zhimou XU, Jing PENG. Research on Anodic Aluminum Oxide Nanostructured LEDs[J]. Journal of Inorganic Materials, 2020, 35(5): 561
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