[1] Robert Bogue. Nanometrology: a critical discipline for the twenty-first century［J］. Sensor Review, 2007, 27(3): 189～196
[2] Gaoliang Dai, Frank Pohlenz, Min Xu et al.. Accurate and traceable measurement of nano-and microstructures［J］. Measure Sci. Technol., 2006, 17(3): 545～552
[3] Sitian Gao, Hua Du, Minzhen Lu et al.. Traceable nano geometric structure measurement and international comparison［J］. J. Nanoscience and Nanotechnology, 2009, 9(2): 692～697
[4] Günter Wilkening, Ludger Koenders. Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range［M］. New Jersey: Wiley-VCH, 2005. 48～59; 207～219
[5] G. Dai, L. Koenders, F. Pohlenz et al.. Accurate and traceable calibration of one-dimensional gratings［J］. Measure. Sci. Technol., 2005, 16(6): 1241～1249
[6] A. N. Korolev, V. I. Korotkov, A. Ya. Lukin et al.. Measurement of the step height in the nanometric range using a laser microinterferometer［J］. Measurement Techniques, 2005, 48(4): 352～358
[7] Zhang Wentao, Li Tongbao. Analysis of narometrology and atom photolithography［J］. J. Applied Optics, 2006, 27(3): 242～245
[8] Zhang Wentao, Li Tongbao. Research on nanostructures fabricated by atom lithography with ~(52)Gr［J］. Chinese J. Quantum Electronics, 2007, 24(1): 85～88
[9] Gao Sitian, Shao Hongwei, Wang Chunyan. Precise measurement of nano-gratings and international comparison nano4［J］. Acta Metrologica Sinica, 2008, 29(z1): 118～121
[10] Tai Hyun Yoon. Diffractometric methods for absolute measurement of diffraction-grating spacings［J］. Opt. Lett., 1999, 24(2): 107～109
[11] Ichiko Misum, Satoshi Gonda, Tomizo Kurosawa et al.. Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope［J］. Measure. Sci. Technol., 2003, 14(4): 463～471
[12] Jongahn Kim, Jae Wankim, Byong Chonpark et al.. Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope［J］. Measure. Sci. Technol., 2006, 17(7): 1792～1800
