Wafer-level hermetically sealed silicon photonic MEMS

Gaehun Jo; Pierre Edinger; Simon J. Bleiker; Xiaojing Wang; Alain Yuji Takabayashi; Hamed Sattari; Niels Quack; Moises Jezzini; Jun Su Lee; Peter Verheyen; Iman Zand; Umar Khan; Wim Bogaerts; Göran Stemme; Kristinn B. Gylfason; Frank Niklaus

doi:10.1364/PRJ.441215

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