Wafer-level hermetically sealed silicon photonic MEMS

Gaehun Jo; Pierre Edinger; Simon J. Bleiker; Xiaojing Wang; Alain Yuji Takabayashi; Hamed Sattari; Niels Quack; Moises Jezzini; Jun Su Lee; Peter Verheyen; Iman Zand; Umar Khan; Wim Bogaerts; Göran Stemme; Kristinn B. Gylfason; Frank Niklaus

doi:10.1364/PRJ.441215

Journals >Photonics Research >Volume 10 >Issue 2 >Page A14 > Article

Photonics Research
Vol. 10, Issue 2, A14 (2022)

Wafer-level hermetically sealed silicon photonic MEMS

Gaehun Jo¹, Pierre Edinger¹, Simon J. Bleiker¹, Xiaojing Wang¹, Alain Yuji Takabayashi², Hamed Sattari², Niels Quack², Moises Jezzini³, Jun Su Lee³, Peter Verheyen⁴, Iman Zand⁵, Umar Khan⁵, Wim Bogaerts⁵, Göran Stemme¹, Kristinn B. Gylfason^1、6、*, and Frank Niklaus^1、7、*

Author Affiliations

¹Division of Micro and Nanosystems, KTH Royal Institute of Technology, 11428 Stockholm, Sweden

²École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland

³Tyndall National Institute, Lee Maltings Complex Dyke Parade, T12 R5CP Cork, Ireland

⁴imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium

⁵Department of Information Technology, Photonics Research Group, Ghent University - IMEC, 9052 Gent, Belgium

⁶e-mail: gylfason@kth.se

⁷e-mail: frank@kth.se

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DOI: 10.1364/PRJ.441215 Cite this Article Set citation alerts

Gaehun Jo, Pierre Edinger, Simon J. Bleiker, Xiaojing Wang, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Moises Jezzini, Jun Su Lee, Peter Verheyen, Iman Zand, Umar Khan, Wim Bogaerts, Göran Stemme, Kristinn B. Gylfason, Frank Niklaus. Wafer-level hermetically sealed silicon photonic MEMS[J]. Photonics Research, 2022, 10(2): A14 Copy Citation Text

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