• Acta Photonica Sinica
  • Vol. 51, Issue 5, 0523001 (2022)
Wenjing XU1、2, Jie CHEN1、*, Zhangqu KUANG3, Li ZHOU1, Ming CHEN1, and Chengbin ZHANG1
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Will Semiconductor Co. Ltd.,Shanghai 201210,China
  • show less
    DOI: 10.3788/gzxb20225105.0523001 Cite this Article
    Wenjing XU, Jie CHEN, Zhangqu KUANG, Li ZHOU, Ming CHEN, Chengbin ZHANG. Design and Experiment of Low-voltage 4T-PPD Active Pixel[J]. Acta Photonica Sinica, 2022, 51(5): 0523001 Copy Citation Text show less
    4T-PPD active pixel structure and the potential distribution of the 4T-PPD photogenerated electrons
    Fig. 1. 4T-PPD active pixel structure and the potential distribution of the 4T-PPD photogenerated electrons
    Relationship between the length LAB of the distance without fringing field and the photogenerated charge to the full-well charge Qn/Qn,sat
    Fig. 2. Relationship between the length LAB of the distance without fringing field and the photogenerated charge to the full-well charge Qn/Qn,sat
    Layouts of two shaped PPDs
    Fig. 3. Layouts of two shaped PPDs
    Chip photograph and layout
    Fig. 4. Chip photograph and layout
    Measured photoelectric response curves and lag curves of two shaped PPDs
    Fig. 5. Measured photoelectric response curves and lag curves of two shaped PPDs
    Measured dark currents and QE curves of two shaped PPDs
    Fig. 6. Measured dark currents and QE curves of two shaped PPDs
    Measured sensitivity curves of five-finger shaped PPD with different transfer time
    Fig. 7. Measured sensitivity curves of five-finger shaped PPD with different transfer time
    Measured conversion gain of the five-finger shaped PPD
    Fig. 8. Measured conversion gain of the five-finger shaped PPD
    Captured images from the five-finger shaped chip in high and low light
    Fig. 9. Captured images from the five-finger shaped chip in high and low light
    ParameterThis workRef.[4Ref.[17Ref.[18
    Process/nm11011035065
    Pixel pitch/µm2.85.05.04.0
    Pixel type4T PPD4T PPD3T ActiveDigital
    Pixel power supply/V1.53.30.91.50.5
    Conversion gain/(µV/e-126.4641934N/A
    Full-well capacity/e-4 92815 60026 00026 065N/A
    Dynamic range/dB67.3695049.542
    Random noise/e-rms1.555.583.788416
    Table 1. Comparison of the proposed five-finger shaped PPD with other references
    Wenjing XU, Jie CHEN, Zhangqu KUANG, Li ZHOU, Ming CHEN, Chengbin ZHANG. Design and Experiment of Low-voltage 4T-PPD Active Pixel[J]. Acta Photonica Sinica, 2022, 51(5): 0523001
    Download Citation