Three- dimensional X- ray diffraction (3DXRD) microscopy is a fast and nondestructive structural characterization technique aimed at studies of the spatial distribution of grains (subgrains) within millimetre-sized polycrystalline specimens. The 3DXRD method is successfully established on BL13W1 imaging beam line at Shanghai Synchrotron Radiation Facility. Several influential factors are studied during the process of data analysis.The accuracy of peak searching is improved effectively by using median filter and image enhancement. More accurate alignment can be achieved by the combination of Debye- Scherrer coarse alignment and the iteration of figure-ofmerit fine alignment. Further operation of parallel computation increases the efficiency of alignment by 4.5 times. The results show that 3DXRD can obtain both far-field and near-field diffraction information simultaneously, deriving grain information such as grain size, center-of-mass position, crystallographic orientation and the degree of grain deformation.