Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials

Kun Du; Xiaowei Li; Bingdong Yang; Chao Zhang; Bo Xia

doi:10.3788/LOP57.111417

Journals >Laser & Optoelectronics Progress >Volume 57 >Issue 11 >Page 111417 > Article

Laser & Optoelectronics Progress
Vol. 57, Issue 11, 111417 (2020)

Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials

Kun Du¹, Xiaowei Li^1、*, Bingdong Yang¹, Chao Zhang¹, and Bo Xia²

Author Affiliations

¹Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²College of Mechanical and Electrical Engineering, Shihezi University, Shihezi, Xinjiang 832000, China

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DOI: 10.3788/LOP57.111417 Cite this Article Set citation alerts

Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417 Copy Citation Text

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Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417

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