• Acta Optica Sinica
  • Vol. 31, Issue 8, 812004 (2011)
Wang Ping*, Tian Wei, Wang Rudong, Wang Lipeng, Sui Yongxin, and Yang Huaijiang
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201131.0812004 Cite this Article Set citation alerts
    Wang Ping, Tian Wei, Wang Rudong, Wang Lipeng, Sui Yongxin, Yang Huaijiang. Rotating Chuck Test for Removing Chuck Error of Optical Surface[J]. Acta Optica Sinica, 2011, 31(8): 812004 Copy Citation Text show less
    References

    [1] Chris J. Evans, Robert J. Hocken, W. Tyler Estler. Self-calibration: reversal, redundancy, error separation, and 'absolute testing'[J]. Ann. CIRP, 1996, 45(2): 617~634

    [2] Günter Schulz, Jürgen Grzanna. Absolute flatness testing by the rotation method with optimal measuring-error compensation[J]. Appl. Opt., 1992, 31(19): 3767~3780

    [3] Robert E. Parks, Lianzhen Shao, Chris J. Evans. Pixel-based absolute topography test for three flats[J]. Appl. Opt., 1998, 37(25): 5951~5956

    [4] Ulf Griesmann. Three-flat test solutions based on simple mirror symmetry[J]. Appl. Opt., 2006, 45(23): 5856~5865

    [5] Chiayu Ai, James C. Wyant. Absolute testing of flats by using even and odd functions[J]. Appl. Opt., 1993, 32(25): 4698~4705

    [6] Chris J. Evans, Robert N. Kenster. Test optics error removal [J]. Appl. Opt., 1996, 35(7): 1015~1021

    [7] Klaus R. Freischlad. Absolute interferometric testing based on reconstruction of rotational shear[J]. Appl. Opt., 2001, 40(10): 1637~1648

    [8] R. E. Parks. Removal of test optics errors [C]. SPIE, 1978, 153: 56~63

    [9] Ulf Griesmann, Quandou Wang, Johannes Soons. Three-flat tests including mounting-induced deformations [J]. Opt. Engng., 2007, 46(9): 093601

    [10] Miao Erlong, Zhang Jian, Gu Yongqiang et al.. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective[J]. Chinese J. Lasers, 2010, 37(8): 2029~2034

    [11] Liu Dong, Yang Yongying, Tian Chao et al.. Analysis and correction of retrace error for nonull aspheric testing[J]. Acta Optica Sinica, 2009, 29(3): 688~696

    [12] Geng Wenbao, Zhai Linpei, Ding Yalin. Analysis of influence of vibration on transfer function in optics imaging system[J]. Optics and Precision Engineering, 2009, 17(2): 314~320

    [13] Liu Ke, Li Yanqiu. A new calibration method of systematic errors in phase-shifting point diffraction interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923~2927

    [14] Shi Feng, Dai Yifan, Peng Xiaoqiang et al.. Magnetorheological finishing for high-precision optical surface[J]. Optics and Precision Engineering, 2009, 17(8): 1859~1864

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    Wang Ping, Tian Wei, Wang Rudong, Wang Lipeng, Sui Yongxin, Yang Huaijiang. Rotating Chuck Test for Removing Chuck Error of Optical Surface[J]. Acta Optica Sinica, 2011, 31(8): 812004
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