In order to realize high accuracy test for optical surface, a rotation chuck method is built and its principle, model analysis and error analysis are researched. Based on the optical component mounting case, the property of surface deformation is analyzed. The surface profile is fitted with Zernike polynomials. The principle model of rotation chuck method is studied, and the equation of surface real profile is derived from the model. Then, the principle model is analyzed with numerical simulation method. The results of surface profile and the real surface profile are compared. Finally, the error sources of rotation chuck method are researched. Analysis results indicate that the rotation chuck method can remove mounting error efficiently, the difference between the computed profile and the real profile is the high-order symmetrical Zernike polynomials, which can satisfy the high accuracy requirement of optical surface tests.