• Photonics Research
  • Vol. 6, Issue 5, B74 (2018)
David Allioux1、*, Ali Belarouci1、2, Darren Hudson3, Eric Magi3, Milan Sinobad1、4, Guillaume Beaudin2, Adrien Michon5, Neetesh Singh3, Regis Orobtchouk1, and Christian Grillet1、6
Author Affiliations
  • 1Université de Lyon, Institut des Nanotechnologie de Lyon, 69131 Ecully, France
  • 2Department of Electrical Engineering, Université de Sherbrooke, Sherbrooke, QC J1K 2R1, Canada
  • 3School of Physics, University of Sydney, Sydney, NSW 2006, Australia
  • 4RMIT School of Electrical and Computer Engineering, Melbourne, VIC 3000, Australia
  • 5Université Côte d’Azur, CNRS, CRHEA, France
  • 6e-mail: Christian.grillet@ec-lyon.fr
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    DOI: 10.1364/PRJ.6.000B74 Cite this Article Set citation alerts
    David Allioux, Ali Belarouci, Darren Hudson, Eric Magi, Milan Sinobad, Guillaume Beaudin, Adrien Michon, Neetesh Singh, Regis Orobtchouk, Christian Grillet. Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [Invited][J]. Photonics Research, 2018, 6(5): B74 Copy Citation Text show less

    Abstract

    We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near- to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.
    Δftheo=0.3151.7632γPinQλpFSRπC|β2|.(1)

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    David Allioux, Ali Belarouci, Darren Hudson, Eric Magi, Milan Sinobad, Guillaume Beaudin, Adrien Michon, Neetesh Singh, Regis Orobtchouk, Christian Grillet. Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [Invited][J]. Photonics Research, 2018, 6(5): B74
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