Zhichang Mo, Jingsong Wei, Qing Cao. Study on Imaging Characteristics of Multilayer Micropatterns[J]. Acta Optica Sinica, 2021, 41(20): 2011001
- Acta Optica Sinica
- Vol. 41, Issue 20, 2011001 (2021)
Fig. 1. Schematic diagram of the micropattern preparation. (a) Process flow diagram; (b) schematic diagram of the laser writing system
Fig. 2. Characteristics of single-layer micropattern. (a) Transmittances of glass substrate and micro pattern; (b) principle of multilayer imaging
Fig. 3. SEM image of the micropattern
Fig. 4. Imaging results of the optical microscope. (a) Multilayer micropatterns; (b) resolution plate images under glass substrates with different layers
Fig. 5. Simulation results of the light field. (a) Influence of crosstalk on the model; (b) field distribution after plane wave incident; (c) field distribution after random light field incident
Fig. 6. MTF of the system under glass of different thicknesses. (a) D=0.34 mm; (b) D=3.4 mm; (c) D=6.8 mm (single layer); (d) D=6.8 mm (multilayer)
Fig. 7. Signal diagram under different layers. (a) Interception position of the light intensity signal; (b) signal diagrams at different layers
Fig. 8. Different paths in the back and forth reflection and the offset distance of the object plane
Fig. 9. Simulation diagram of the reflected field light intensity. (a) Distribution of the reflected field on the object surface; (b) distribution of the light field after passing through all the interfaces
Fig. 10. Bottom layer imaging results of different filling media. (a) Air; (b) ethanol
Fig. 11. Contrast of different images. (a) Original image; (b) processed image
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Table 1. Parameters under different m conditions
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