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    Journals >Acta Optica Sinica >Volume 41 >Issue 20 >Page 2011001 > Article
    • Acta Optica Sinica
    • Vol. 41, Issue 20, 2011001 (2021)
    Study on Imaging Characteristics of Multilayer Micropatterns
    Zhichang Mo1、2, Jingsong Wei2、*, and Qing Cao1
    Author Affiliations
  • 1College of Sciences, Shanghai University, Shanghai 200444, China
  • 2Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/AOS202141.2011001 Cite this Article Set citation alerts
    Zhichang Mo, Jingsong Wei, Qing Cao. Study on Imaging Characteristics of Multilayer Micropatterns[J]. Acta Optica Sinica, 2021, 41(20): 2011001 Copy Citation Text show less
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    Article index updated: Jun. 18, 2024
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    Zhichang Mo, Jingsong Wei, Qing Cao. Study on Imaging Characteristics of Multilayer Micropatterns[J]. Acta Optica Sinica, 2021, 41(20): 2011001
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