• Chinese Optics Letters
  • Vol. 15, Issue 12, 123101 (2017)
Mingdong Kong1、2, Chun Guo1、*, Bincheng Li1、3, Wenyan He1、2, and Ming Wei1
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100039, China
  • 3School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
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    DOI: 10.3788/COL201715.123101 Cite this Article Set citation alerts
    Mingdong Kong, Chun Guo, Bincheng Li, Wenyan He, Ming Wei. Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging[J]. Chinese Optics Letters, 2017, 15(12): 123101 Copy Citation Text show less
    (Color online) Refractive indexes of Ta2O5, SiO2, and fused silica substrate for the design of a multi-wavelength filter.
    Fig. 1. (Color online) Refractive indexes of Ta2O5, SiO2, and fused silica substrate for the design of a multi-wavelength filter.
    (Color online) (a) Calculated transmittance of thin film on side A without backside coating. (b) Layer thickness profile of optical coating for side A. (c) Calculated transmittance of thin film for side B without backside coating. (d) Layer thickness profile of optical coating on side B.
    Fig. 2. (Color online) (a) Calculated transmittance of thin film on side A without backside coating. (b) Layer thickness profile of optical coating for side A. (c) Calculated transmittance of thin film for side B without backside coating. (d) Layer thickness profile of optical coating on side B.
    (Color online) Transmittance spectra of two experimental runs and theoretical design for the multi-wavelength filter coated on side A.
    Fig. 3. (Color online) Transmittance spectra of two experimental runs and theoretical design for the multi-wavelength filter coated on side A.
    (Color online) Transmittance spectra of the two-side-coated multi-wavelength filter, and after temperature and humidity tests.
    Fig. 4. (Color online) Transmittance spectra of the two-side-coated multi-wavelength filter, and after temperature and humidity tests.
    MaterialTemperature (°C)Deposition rate (nm/s)Bias voltage (V)Discharge current (A)Gas flow (sccm)
    O2Ar
    Ta2O52000.5130501510
    SiO21.01405
    Table 1. Deposition Parameters for the Ta2O5 and SiO2 Films
     Temperature (°C)Test Time (h)Rate of Temperature Change (°C/min)
    Temperature test652<2
    402<2
    Table 2. Temperature Test Parameters
     Temperature (°C)Relative Humidity (%)Test Time (h)
    Humidity test609572
    Table 3. Humidity Test Parameters
    Mingdong Kong, Chun Guo, Bincheng Li, Wenyan He, Ming Wei. Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging[J]. Chinese Optics Letters, 2017, 15(12): 123101
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