Wei Wang, Ying Tang, Xiongxing Zhang, Haibin Chen, Zilong Guo, Kening Wang. Elliptical-Fitting Cavity Length Demodulation Algorithm for Compound Fiber-Optic Fabry-Perot Pressure Sensor with Short Cavity[J]. Acta Optica Sinica, 2019, 39(6): 0606001
- Acta Optica Sinica
- Vol. 39, Issue 6, 0606001 (2019)
Fig. 1. Basic structure of compound fiber-optic Fabry-Perot pressure sensor
Fig. 2. Lissajous figure obtained by six-parameter ellipse-fitting algorithm
Fig. 3. Reflection spectrum of compound FP sensor with short cavity and interferometric signal for cavity filling with air
Fig. 4. Lissajous figure when interferometric signal has translation of τ=1.238 THz along frequency axis
Fig. 5. Demodulation system for fiber-optic Fabry-Perot sensor. (a) Schematic; (b) physical map
Fig. 6. Compound fiber-optic Fabry-Perot pressure sensor with short cavity. (a) Physical map; (b) SEM image
Fig. 7. Experimental setup for pressure sensing
Fig. 8. Experimental results of pressure sensing. (a) Reflection spectra for cavity filling with air under three kinds of pressure-loading conditions of 0.1, 0.3, and 0.5 MPa; (b) sensor cavity length versus pressure
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Table 1. Complexity statistics of QR, LU, and improved Cholesky decomposition methods
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Table 2. Calculation results of length of cavity filling with air obtained by two-parameter ellipse-fitting algorithm for cavity length in range of 26-30 μm
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