Xisheng ZHANG, Chunyu YAN, Jingzhou WANG, Ziwei MA, Chenzhong YAO. Optimizing Processes of Silicon Heterojunction Solar Cell[J]. Acta Photonica Sinica, 2021, 50(12): 1223001
- Acta Photonica Sinica
- Vol. 50, Issue 12, 1223001 (2021)
Fig. 1. Structure and process flow of SHJ solar cell
Fig. 2. SEM image of as-cut silicon wafer， wafer after saw damage etch， incompletely textured wafer， pyramid surface etched in 2% and 6% alkaline solutions and after chemical polishing
Fig. 3. Reflectivity of original and textured wafers， MCL of passivated wafers affected by chemical polishing， pyramidsize and a-Si：H deposited at different temperatures
Fig. 4. Performances of SHJ solar cells
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