• Acta Optica Sinica
  • Vol. 41, Issue 23, 2315001 (2021)
Wenjun Chen1、2, Yihe Yin1、2, Yueqiang Zhang1、2、*, Xiaolin Liu1、2, and Qifeng Yu1、2
Author Affiliations
  • 1Institute of Intelligent Optical Measurement and Detection, Shenzhen University, Shenzhen, Guangdong 518000, China
  • 2College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, Guangdong 518000, China
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    DOI: 10.3788/AOS202141.2315001 Cite this Article Set citation alerts
    Wenjun Chen, Yihe Yin, Yueqiang Zhang, Xiaolin Liu, Qifeng Yu. Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera[J]. Acta Optica Sinica, 2021, 41(23): 2315001 Copy Citation Text show less
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    Wenjun Chen, Yihe Yin, Yueqiang Zhang, Xiaolin Liu, Qifeng Yu. Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera[J]. Acta Optica Sinica, 2021, 41(23): 2315001
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