Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera

Wenjun Chen; Yihe Yin; Yueqiang Zhang; Xiaolin Liu; Qifeng Yu

doi:10.3788/AOS202141.2315001

Journals >Acta Optica Sinica >Volume 41 >Issue 23 >Page 2315001 > Article

Acta Optica Sinica
Vol. 41, Issue 23, 2315001 (2021)

Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera

Wenjun Chen^1、2, Yihe Yin^1、2, Yueqiang Zhang^1、2、*, Xiaolin Liu^1、2, and Qifeng Yu^1、2

Author Affiliations

¹Institute of Intelligent Optical Measurement and Detection, Shenzhen University, Shenzhen, Guangdong 518000, China

²College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, Guangdong 518000, China

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DOI: 10.3788/AOS202141.2315001 Cite this Article Set citation alerts

Wenjun Chen, Yihe Yin, Yueqiang Zhang, Xiaolin Liu, Qifeng Yu. Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera[J]. Acta Optica Sinica, 2021, 41(23): 2315001 Copy Citation Text

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Article index updated: Nov. 1, 2024

The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)

Wenjun Chen, Yihe Yin, Yueqiang Zhang, Xiaolin Liu, Qifeng Yu. Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera[J]. Acta Optica Sinica, 2021, 41(23): 2315001

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