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Journal of Inorganic Materials
Vol. 36, Issue 6, 608 (2021)

Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching

Lichi CHEN^1,2, Yaogong WANG^1,2, Wenjiang WANG^1,2, Xiaoqin MA^1,2..., Jingyuan YANG^3,* and Xiaoning ZHANG^1,2|Show fewer author(s)

Author Affiliations

¹1. Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China

²2. School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China

³3. Nuclear and Radiation Safety Center, Beijing 100082, China

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DOI: 10.15541/jim20200509 Cite this Article

Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608 Copy Citation Text

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References

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[3] G PENNELLI, S ELYAMNY, E DIMAGGIO et al. Thermal conductivity of silicon nanowire forests. Nanotechnology, 29, 505402(2018).

[4] V MOKSHIN P, S JUNEJA, S PAVELYEV V. Synthesis of silicon nanowires using plasma chemical etching process for solar cell applications. Journal of Physics: Conference Series, 1368, 022060(2019).

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[7] T ADAM, U HASHIM. Silicon nanowire fabrication: silicon trimming via shallow anisotropic etching. Microelectronics International, 31, 78-85(2014).

[8] S ACHARYA, A KOTTANTHARAYIL. Poole-Frenkel transport in gold catalyzed VLS grown silicon nanowires. IEEE Transactions on Electron Devices, 65, 1685-1691(2018).

[9] VINZONS LESTER U, SHU LEI, YIP SENPO et al. Unraveling the morphological evolution and etching kinetics of porous silicon nanowires during metal-assisted chemical etching. Nanoscale Research Letters, 12, 385(2017).

[10] T CONG L, LAM N T NGOC, N T GIANG et al. N-type silicon nanowires prepared by silver metal-assisted chemical etching: fabrication and optical properties. Materials Science in Semiconductor Processing, 90, 198-204(2019).

[11] ACA-LÓPEZ VIRIDIANA, QUIROGA-GONZÁLEZ ENRIQUE, GÓMEZ-BAROJAS ESTELA et al. Effects of the doping level in the production of silicon nanowalls by metal assisted chemical etching. Materials Science in Semiconductor Processing, 118, 105206(2020).

[12] F ZHU Y, L ZHOU, J PAN C et al. Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method. Journal of Materials Science Materials in Electronics, 27, 5833-5838(2016).

[13] J HUNG Y, L LEE S. Manipulating the antireflective properties of vertically-aligned silicon nanowires. Solar Energy Materials & Solar Cells, 130, 573-581(2014).

[14] L LI, Y FANG, C XU et al. Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation. Nanotechnology, 27, 165303(2016).

[15] LI HE, WEN-JIANG WANG, XIAO-NING ZHANG. Improvement of electron emission characteristics of porous silicon emitter by using cathode reduction and electrochemical oxidation. Applied Surface Science, 399, 592-598(2017).

[16] T KOMODA, X SHENG, N KOSHIDA. Mechanism of efficient and stable surface-emitting cold cathode based on porous polycrystalline silicon films. Journal of Vacuum Science & Technology B, 17, 1076-1079(1999).

[17] W FENG, H ARAKI, M OZAKI et al. Field emission properties of the nonaligned multiwalled carbon nanotube films with different length. Japanese Journal of Applied Physics, 44, L253-L255(2005).

[18] K ZHU, B VINZANT T, R NEALE N et al. Removing structural disorder from oriented TiO₂ nanotube arrays: reducing the dimensionality of transport and recombination in dye-sensitized solar cells. Nano Letters, 7, 3739(2007).

[19] H HAN, Z HUANG, W LEE. Metal-assisted chemical etching of silicon and nanotechnology applications. Nano Today, 9, 271-304(2014).

[20] A ABDULKADIR, A AZIZ, Z PAKHURUDDIN M. Effects of silver nanoparticles layer thickness towards properties of black silicon fabricated by metal-assisted chemical etching for photovoltaics. SN Applied Sciences, 2, 515(2020).

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Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608

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