Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching

Lichi CHEN; Yaogong WANG; Wenjiang WANG; Xiaoqin MA; Jingyuan YANG; Xiaoning ZHANG

doi:10.15541/jim20200509

Journals >Journal of Inorganic Materials >Volume 36 >Issue 6 >Page 608 > Article

Journal of Inorganic Materials
Vol. 36, Issue 6, 608 (2021)

Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching

Lichi CHEN^1,2, Yaogong WANG^1,2, Wenjiang WANG^1,2, Xiaoqin MA^1,2..., Jingyuan YANG^3,* and Xiaoning ZHANG^1,2|Show fewer author(s)

Author Affiliations

¹1. Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China

²2. School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China

³3. Nuclear and Radiation Safety Center, Beijing 100082, China

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DOI: 10.15541/jim20200509 Cite this Article

Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608 Copy Citation Text

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