• Journal of Inorganic Materials
  • Vol. 36, Issue 6, 608 (2021)
Lichi CHEN1、2, Yaogong WANG1、2, Wenjiang WANG1、2, Xiaoqin MA1、2, Jingyuan YANG3、*, and Xiaoning ZHANG1、2
Author Affiliations
  • 11. Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China
  • 22. School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
  • 33. Nuclear and Radiation Safety Center, Beijing 100082, China
  • show less
    DOI: 10.15541/jim20200509 Cite this Article
    Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608 Copy Citation Text show less
    Schematic drawing of preparation device
    1. Schematic drawing of preparation device
    SEM morphologies of samples prepared by different methods
    2. SEM morphologies of samples prepared by different methods
    Effect of AgNO3 concentration on the morphology of SiNWs/PS composites
    3. Effect of AgNO3 concentration on the morphology of SiNWs/PS composites
    Effect of etching time on the morphology of SiNWs/PS composites
    4. Effect of etching time on the morphology of SiNWs/PS composites
    Effect of etching current on the morphology of SiNWs/PS composites
    5. Effect of etching current on the morphology of SiNWs/PS composites
    Comparison of the morphology of samples prepared by different currents at the same scale
    6. Comparison of the morphology of samples prepared by different currents at the same scale
    Schematic diagram of EMACE method
    7. Schematic diagram of EMACE method
    Variation of voltage/current between anode and cathode with time during the etching
    8. Variation of voltage/current between anode and cathode with time during the etching
    Test results of field emission characteristics
    9. Test results of field emission characteristics
    Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608
    Download Citation