• Chinese Journal of Lasers
  • Vol. 49, Issue 12, 1202001 (2022)
Songyan Xue1, Huace Hu1, Yinuo Xu1, Yingchen Wang1, Jing Long1, Binzhang Jiao1, Yuncheng Liu1, Xuhao Fan1, Hui Gao1、2, Leimin Deng1、2, and Wei Xiong1、2、*
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
  • 2Optics Valley Laboratory, Wuhan 430074, Hubei, China
  • show less
    DOI: 10.3788/CJL202249.1202001 Cite this Article Set citation alerts
    Songyan Xue, Huace Hu, Yinuo Xu, Yingchen Wang, Jing Long, Binzhang Jiao, Yuncheng Liu, Xuhao Fan, Hui Gao, Leimin Deng, Wei Xiong. Research Progress and Application of Femtosecond Laser-Induced Patterned Growth of Nanomaterials[J]. Chinese Journal of Lasers, 2022, 49(12): 1202001 Copy Citation Text show less
    Existing in situ synthesis methods of patterned nanomaterials[23,25-26]. (a) UV photolithography/E-beam lithography; (b) solution direct-patterning technology; (c) CW/long pulsed laser selectively induced synthesis
    Fig. 1. Existing in situ synthesis methods of patterned nanomaterials[23,25-26]. (a) UV photolithography/E-beam lithography; (b) solution direct-patterning technology; (c) CW/long pulsed laser selectively induced synthesis
    CW/long pulsed laser induced synthesis of metal, molybdenum sulfide, zinc oxide nanowires, and graphene[33,35-37]. (a) Cu nanoparticles synthesized by laser-induced photoreduction; (b)(c) AFM characterization results of synthesized molybdenum sulfide; (d)(e) Raman spectroscopy characterization results of synthesized molybdenum sulfide; (f) SEM image of synthesized zinc oxide nanowires; (g) TEM characterization result of synthesized zinc oxide nanowires; (h) optical micrograph of graphene synthesized by laser induced chemical vapor deposition; (i) Raman spectroscopy characterization result of graphene synthesized by laser induced chemical vapor deposition
    Fig. 2. CW/long pulsed laser induced synthesis of metal, molybdenum sulfide, zinc oxide nanowires, and graphene[33,35-37]. (a) Cu nanoparticles synthesized by laser-induced photoreduction; (b)(c) AFM characterization results of synthesized molybdenum sulfide; (d)(e) Raman spectroscopy characterization results of synthesized molybdenum sulfide; (f) SEM image of synthesized zinc oxide nanowires; (g) TEM characterization result of synthesized zinc oxide nanowires; (h) optical micrograph of graphene synthesized by laser induced chemical vapor deposition; (i) Raman spectroscopy characterization result of graphene synthesized by laser induced chemical vapor deposition
    Comparison of single-photon absorption and multi-photon absorption[51]. (a) Electron excitation processes;(b) spatial distribution of laser energy with threshold for reaction indicated by horizontal solid line
    Fig. 3. Comparison of single-photon absorption and multi-photon absorption[51]. (a) Electron excitation processes;(b) spatial distribution of laser energy with threshold for reaction indicated by horizontal solid line
    Patterned metal micro-nano structures synthesized by femtosecond laser[62-66]. (a) SEM image of miniature 3D silver bridge; (b) schematic of patterned Au nanomaterials synthesized by femtosecond laser direct writing; (c) SEM image of miniature silver pillar with magnified image shown in inset; (d) SEM image of arrayed silver pyramids; (e) SEM image of four gold electrodes connected vertically by as-synthesized silver micro-nano structures
    Fig. 4. Patterned metal micro-nano structures synthesized by femtosecond laser[62-66]. (a) SEM image of miniature 3D silver bridge; (b) schematic of patterned Au nanomaterials synthesized by femtosecond laser direct writing; (c) SEM image of miniature silver pillar with magnified image shown in inset; (d) SEM image of arrayed silver pyramids; (e) SEM image of four gold electrodes connected vertically by as-synthesized silver micro-nano structures
    Patterned SnO2 micro-nano structure synthesized by femtosecond laser[68]. (a) Chemical reaction in precursor preparation; (b) absorption spectra of precursor before and after femtosecond laser irradiation with schematic of processing shown in inset; (c) SEM image of helical product before high temperature annealing with magnified image shown in inset; (d) SEM image of helical product after high temperature annealing with magnified image shown in inset; (e) XRD characterization result of annealed product; (f) electric test result of product; (g) test result of humidity sensor
    Fig. 5. Patterned SnO2 micro-nano structure synthesized by femtosecond laser[68]. (a) Chemical reaction in precursor preparation; (b) absorption spectra of precursor before and after femtosecond laser irradiation with schematic of processing shown in inset; (c) SEM image of helical product before high temperature annealing with magnified image shown in inset; (d) SEM image of helical product after high temperature annealing with magnified image shown in inset; (e) XRD characterization result of annealed product; (f) electric test result of product; (g) test result of humidity sensor
    Patterned TiO2/C micro-nano structure synthesized by femtosecond laser[72]. (a) Schematics of preparations of TiO2/C micro-nano structure and its pressure sensor; (b) SEM image of product with magnified image shown in inset; (c) Raman characterization results of precursors and products synthesized under different laser processing powers; (d) test results of pressure sensor; (e) principle diagrams of pressure sensor
    Fig. 6. Patterned TiO2/C micro-nano structure synthesized by femtosecond laser[72]. (a) Schematics of preparations of TiO2/C micro-nano structure and its pressure sensor; (b) SEM image of product with magnified image shown in inset; (c) Raman characterization results of precursors and products synthesized under different laser processing powers; (d) test results of pressure sensor; (e) principle diagrams of pressure sensor
    rGO-ZnO and its UV photodetector synthesized by femtosecond laser[73]. (a) Schematics of interdigitated electrode and active detection layer prepared by changing laser scanning speed and schematics of rGO-ZnO hybrid-based photodetector prepared by single-step FLDW process; (b) EDX characterization results of products
    Fig. 7. rGO-ZnO and its UV photodetector synthesized by femtosecond laser[73]. (a) Schematics of interdigitated electrode and active detection layer prepared by changing laser scanning speed and schematics of rGO-ZnO hybrid-based photodetector prepared by single-step FLDW process; (b) EDX characterization results of products
    SnO2 and its photo and gas detector synthesized by femtosecond laser[69]. (a) SEM image of line pattern; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 8(b); (d) optical micrograph of photo and gas detector; (e) detecting result of gas detector to H2S; (f) detecting result of photo detector
    Fig. 8. SnO2 and its photo and gas detector synthesized by femtosecond laser[69]. (a) SEM image of line pattern; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 8(b); (d) optical micrograph of photo and gas detector; (e) detecting result of gas detector to H2S; (f) detecting result of photo detector
    ZnO and its UV photodetector synthesized by femtosecond laser[70]. (a) SEM image of linear product; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 9(b); (d) optical micrograph of UV photodetector; (e) current-voltage test result of UV photodetector; (f) time response test result of UV photodetector
    Fig. 9. ZnO and its UV photodetector synthesized by femtosecond laser[70]. (a) SEM image of linear product; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 9(b); (d) optical micrograph of UV photodetector; (e) current-voltage test result of UV photodetector; (f) time response test result of UV photodetector
    Patterned molybdenum sulfide nanomaterials synthesized by femtosecond laser [75]. (a) SEM image of product; (b) SEM image of patterned product; (c) AFM characterization result of product; (d) Raman test result of product; (e) optical micrograph of product; (f) Raman mapping of product
    Fig. 10. Patterned molybdenum sulfide nanomaterials synthesized by femtosecond laser [75]. (a) SEM image of product; (b) SEM image of patterned product; (c) AFM characterization result of product; (d) Raman test result of product; (e) optical micrograph of product; (f) Raman mapping of product
    Molybdenum sulfide micro-nano gas detector prepared by femtosecond laser[75]. (a) Optical micrograph of detector; (b) response of sensor to NO2 at room temperature; (c) response of sensor to NO2 with volume fraction of 0.5×10-6 at room temperature; (d) time response of sensor at 50 ℃;(e) response of sensor to H2S at room temperature; (f) response of sensor to NH3 at room temperature
    Fig. 11. Molybdenum sulfide micro-nano gas detector prepared by femtosecond laser[75]. (a) Optical micrograph of detector; (b) response of sensor to NO2 at room temperature; (c) response of sensor to NO2 with volume fraction of 0.5×10-6 at room temperature; (d) time response of sensor at 50 ℃;(e) response of sensor to H2S at room temperature; (f) response of sensor to NH3 at room temperature
    Patterned graphene nanomaterials synthesized by femtosecond laser[85,89]. (a) Processing schematic of femtosecond laser-induced patterned graphene on Ni/C thin films; (b) processing schematic of femtosecond laser-induced reduction of graphene oxide; (c) optical micrograph of patterned graphene product; (d) Raman mapping characterization of patterned graphene product; (e) optical micrograph of graphene spiral microcircuit structure; (f) optical micrograph of graphene comb-like microcircuit
    Fig. 12. Patterned graphene nanomaterials synthesized by femtosecond laser[85,89]. (a) Processing schematic of femtosecond laser-induced patterned graphene on Ni/C thin films; (b) processing schematic of femtosecond laser-induced reduction of graphene oxide; (c) optical micrograph of patterned graphene product; (d) Raman mapping characterization of patterned graphene product; (e) optical micrograph of graphene spiral microcircuit structure; (f) optical micrograph of graphene comb-like microcircuit
    Laser-induced preparation of patterned graphene nanomaterials and graphene-based super-capacitors[91-92]. (a) Processing schematic of CW laser-induced preparation of graphene-based super-capacitor and its SEM images; (b) processing schematic of femtosecond laser-induced preparation of graphene-based super-capacitors; (c)-(g) optical micrographs of graphene-based super-capacitors prepared by femtosecond laser
    Fig. 13. Laser-induced preparation of patterned graphene nanomaterials and graphene-based super-capacitors[91-92]. (a) Processing schematic of CW laser-induced preparation of graphene-based super-capacitor and its SEM images; (b) processing schematic of femtosecond laser-induced preparation of graphene-based super-capacitors; (c)-(g) optical micrographs of graphene-based super-capacitors prepared by femtosecond laser
    Laser sourceNanomaterialPrecursorSubstrateRef.
    KrF excimer laser(wavelength of 248 nm, pulse width of 20 ns)GrapheneGraphene oxideSi/SiO2[38]
    Solid state CW laser (wavelength of 532 nm)GrapheneMethaneNickel foil[33]
    CW laser diode (wavelength of 808 nm)Carbon nanotubeAcetyleneGlass with carbon black absorbed layer[32]
    Nd∶YAG CW laser (wavelength of 532 nm)MoS2(NH4)2MoS4Si/SiO2[36]
    CW laser (wavelength of 808 nm)MoS2MoO3 and sulfurNi absorbed layer and TiO2 barrier layer[40]
    Nd∶YAG CW laser (wavelength of 532 nm)ZnO nanowireZinc acetateGlass with Ti/Au absorbed layer[34]
    Pulsed laser diode (wavelength of 1064 nm)ZnO/CuOZn(NO3)2/Cu(NO3)2·3H2OSi/SiO2 with W absorbed layer[41]
    Yb-doped fiber CW laser and pulsed laser (wavelength of 1070 nm)Cu nanoparticlesCuOSoda lime glass[35]
    Table 1. Summary of selectively induced synthesis of nanomaterials by CW/long pulsed laser[32-36,38,40-41]
    MethodInkjet printingE-jet printingScreen printingSpray coatingSoft lithographyGravureFLDW
    Line width /μm20-500.5-200.010-10050-1500.01-10.0010-1001
    Printing speed /(mm·s-1)1-70000.2-10.050-1000100-1000-5-10000.01-1.00
    Ink viscosity /(10-3 Pa·s)1-1001-1000030-1200010-100-100-10000-
    Thickness /nm100-100020-2005000-100000500-100010010-100050-200
    Template requirementNoNoYesNoYesYesNo
    Design flexibilityHighHighLowMediumLowLowHigh
    Subsequent heat treatmentNeedNeedNeedNeedNeedNeedNot necessary
    Table 2. Comparison of main performance indexes of FLDW and common solution direct-patterning technologies[52-61]
    Songyan Xue, Huace Hu, Yinuo Xu, Yingchen Wang, Jing Long, Binzhang Jiao, Yuncheng Liu, Xuhao Fan, Hui Gao, Leimin Deng, Wei Xiong. Research Progress and Application of Femtosecond Laser-Induced Patterned Growth of Nanomaterials[J]. Chinese Journal of Lasers, 2022, 49(12): 1202001
    Download Citation