Author Affiliations
1Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China2Optics Valley Laboratory, Wuhan 430074, Hubei, Chinashow less
Fig. 1. Existing
in situ synthesis methods of patterned nanomaterials
[23,25-26]. (a) UV photolithography/E-beam lithography; (b) solution direct-patterning technology; (c) CW/long pulsed laser selectively induced synthesis
Fig. 2. CW/long pulsed laser induced synthesis of metal, molybdenum sulfide, zinc oxide nanowires, and graphene
[33,35-37]. (a) Cu nanoparticles synthesized by laser-induced photoreduction; (b)(c) AFM characterization results of synthesized molybdenum sulfide; (d)(e) Raman spectroscopy characterization results of synthesized molybdenum sulfide; (f) SEM image of synthesized zinc oxide nanowires; (g) TEM characterization result of synthesized zinc oxide nanowires; (h) optical micrograph of graphene synthesized by laser induced chemical vapor deposition; (i) Raman spectroscopy characterization result of graphene synthesized by laser induced chemical vapor deposition
Fig. 3. Comparison of single-photon absorption and multi-photon absorption
[51]. (a) Electron excitation processes;(b) spatial distribution of laser energy with threshold for reaction indicated by horizontal solid line
Fig. 4. Patterned metal micro-nano structures synthesized by femtosecond laser
[62-66]. (a) SEM image of miniature 3D silver bridge; (b) schematic of patterned Au nanomaterials synthesized by femtosecond laser direct writing; (c) SEM image of miniature silver pillar with magnified image shown in inset; (d) SEM image of arrayed silver pyramids; (e) SEM image of four gold electrodes connected vertically by as-synthesized silver micro-nano structures
Fig. 5. Patterned SnO
2 micro-nano structure synthesized by femtosecond laser
[68]. (a) Chemical reaction in precursor preparation; (b) absorption spectra of precursor before and after femtosecond laser irradiation with schematic of processing shown in inset; (c) SEM image of helical product before high temperature annealing with magnified image shown in inset; (d) SEM image of helical product after high temperature annealing with magnified image shown in inset; (e) XRD characterization result of annealed product; (f) electric test result of product; (g) test result of humidity sensor
Fig. 6. Patterned TiO
2/C micro-nano structure synthesized by femtosecond laser
[72]. (a) Schematics of preparations of TiO
2/C micro-nano structure and its pressure sensor; (b) SEM image of product with magnified image shown in inset; (c) Raman characterization results of precursors and products synthesized under different laser processing powers; (d) test results of pressure sensor; (e) principle diagrams of pressure sensor
Fig. 7. rGO-ZnO and its UV photodetector synthesized by femtosecond laser
[73]. (a) Schematics of interdigitated electrode and active detection layer prepared by changing laser scanning speed and schematics of rGO-ZnO hybrid-based photodetector prepared by single-step FLDW process; (b) EDX characterization results of products
Fig. 8. SnO
2 and its photo and gas detector synthesized by femtosecond laser
[69]. (a) SEM image of line pattern; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 8(b); (d) optical micrograph of photo and gas detector; (e) detecting result of gas detector to H
2S; (f) detecting result of photo detector
Fig. 9. ZnO and its UV photodetector synthesized by femtosecond laser
[70]. (a) SEM image of linear product; (b) SEM image of“HUST”pattern; (c) magnified image of dotted box area in Fig. 9(b); (d) optical micrograph of UV photodetector; (e) current-voltage test result of UV photodetector; (f) time response test result of UV photodetector
Fig. 10. Patterned molybdenum sulfide nanomaterials synthesized by femtosecond laser
[75]. (a) SEM image of product; (b) SEM image of patterned product; (c) AFM characterization result of product; (d) Raman test result of product; (e) optical micrograph of product; (f) Raman mapping of product
Fig. 11. Molybdenum sulfide micro-nano gas detector prepared by femtosecond laser
[75]. (a) Optical micrograph of detector; (b) response of sensor to NO
2 at room temperature; (c) response of sensor to NO
2 with volume fraction of 0.5×10
-6 at room temperature; (d) time response of sensor at 50 ℃;(e) response of sensor to H
2S at room temperature; (f) response of sensor to NH
3 at room temperature
Fig. 12. Patterned graphene nanomaterials synthesized by femtosecond laser
[85,89]. (a) Processing schematic of femtosecond laser-induced patterned graphene on Ni/C thin films; (b) processing schematic of femtosecond laser-induced reduction of graphene oxide; (c) optical micrograph of patterned graphene product; (d) Raman mapping characterization of patterned graphene product; (e) optical micrograph of graphene spiral microcircuit structure; (f) optical micrograph of graphene comb-like microcircuit
Fig. 13. Laser-induced preparation of patterned graphene nanomaterials and graphene-based super-capacitors
[91-92]. (a) Processing schematic of CW laser-induced preparation of graphene-based super-capacitor and its SEM images; (b) processing schematic of femtosecond laser-induced preparation of graphene-based super-capacitors; (c)-(g) optical micrographs of graphene-based super-capacitors prepared by femtosecond laser
Laser source | Nanomaterial | Precursor | Substrate | Ref. |
---|
KrF excimer laser(wavelength of 248 nm, pulse width of 20 ns) | Graphene | Graphene oxide | Si/SiO2 | [38] | Solid state CW laser (wavelength of 532 nm) | Graphene | Methane | Nickel foil | [33] | CW laser diode (wavelength of 808 nm) | Carbon nanotube | Acetylene | Glass with carbon black absorbed layer | [32] | Nd∶YAG CW laser (wavelength of 532 nm) | MoS2 | (NH4)2MoS4 | Si/SiO2 | [36] | CW laser (wavelength of 808 nm) | MoS2 | MoO3 and sulfur | Ni absorbed layer and TiO2 barrier layer | [40] | Nd∶YAG CW laser (wavelength of 532 nm) | ZnO nanowire | Zinc acetate | Glass with Ti/Au absorbed layer | [34] | Pulsed laser diode (wavelength of 1064 nm) | ZnO/CuO | Zn(NO3)2/Cu(NO3)2·3H2O | Si/SiO2 with W absorbed layer | [41] | Yb-doped fiber CW laser and pulsed laser (wavelength of 1070 nm) | Cu nanoparticles | CuO | Soda lime glass | [35] |
|
Table 1. Summary of selectively induced synthesis of nanomaterials by CW/long pulsed laser
[32-36,38,40-41] Method | Inkjet printing | E-jet printing | Screen printing | Spray coating | Soft lithography | Gravure | FLDW |
---|
Line width /μm | 20-50 | 0.5-200.0 | 10-100 | 50-150 | 0.01-10.00 | 10-100 | 1 | Printing speed /(mm·s-1) | 1-7000 | 0.2-10.0 | 50-1000 | 100-1000 | - | 5-1000 | 0.01-1.00 | Ink viscosity /(10-3 Pa·s) | 1-100 | 1-10000 | 30-12000 | 10-100 | - | 100-10000 | - | Thickness /nm | 100-1000 | 20-200 | 5000-100000 | 500-1000 | 100 | 10-1000 | 50-200 | Template requirement | No | No | Yes | No | Yes | Yes | No | Design flexibility | High | High | Low | Medium | Low | Low | High | Subsequent heat treatment | Need | Need | Need | Need | Need | Need | Not necessary |
|
Table 2. Comparison of main performance indexes of FLDW and common solution direct-patterning technologies
[52-61]