• Journal of Infrared and Millimeter Waves
  • Vol. 35, Issue 6, 641 (2016)
LV Yuan-Jie*, FENG Zhi-Hong, ZHANG Zhi-Rong, SONG Xu-Bo, TAN Xin, GUO Hong-Yu, YIN Jia-Yun, FANG Yu-Long, and CAI Shu-Jun
Author Affiliations
  • [in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2016.06.001 Cite this Article
    LV Yuan-Jie, FENG Zhi-Hong, ZHANG Zhi-Rong, SONG Xu-Bo, TAN Xin, GUO Hong-Yu, YIN Jia-Yun, FANG Yu-Long, CAI Shu-Jun. 60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz[J]. Journal of Infrared and Millimeter Waves, 2016, 35(6): 641 Copy Citation Text show less

    Abstract

    Scaled InAlN/GaN heterostructure field-effect transistors (HFETs) on sapphire substrate with high unity current gain cut-off frequency (fT) and maximum oscillation frequency (fmax) were fabricated and characterized. In the device, scaled source-to-drain distance (Lsd) of 600 nm was realized by employing nonalloyed regrown n+-GaN Ohmic contacts. Moreover, a 60-nm T-shaped gate was fabricated by self-aligned-gate technology. A high drain saturation current density (Ids) of 1.89 A/mm @ Vgs= 1 V and a peak extrinsic transconductance (gm) of 462 mS/mm were obtained in the scaled InAlN/GaN HFETs. In addition, from the small-signal RF measurements, the values of fT and fmax for the device with 60-nm gate were extrapolated to be 170 GHz and 210 GHz at the same bias. To our knowledge, they are the highest values of fT and fmax for the domestic InAlN/GaN HFETs.
    LV Yuan-Jie, FENG Zhi-Hong, ZHANG Zhi-Rong, SONG Xu-Bo, TAN Xin, GUO Hong-Yu, YIN Jia-Yun, FANG Yu-Long, CAI Shu-Jun. 60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz[J]. Journal of Infrared and Millimeter Waves, 2016, 35(6): 641
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