[1] Kelly J S. Fault-tolerant Superconducting Qubits[D]. Santa Barbara: University of California Santa Barbara, 2015.
[2] Barends R, Kelly J, Megrant A, et al. Coherent Josephson qubit suitable for scalable quantum integrated circuits[J]. Physical Review Letters, 2013, 111(8): 080502.
[3] Müller C, Cole J H, Lisenfeld J. Towards understanding two-level-systems in amorphous solids: Insights from quantum circuits[J]. Reports on Progress in Physics, 2019, 82(12): 124501.
[4] Calusine G, Melville A, Woods W, et al. Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators[J]. Applied Physics Letters, 2018, 112(6): 062601.
[5] Gao J. The Physics of Superconducting Microwave Resonators[D]. California: California Institute of Technology Pasadena, 2008.
[6] Wisbey D S, Gao J S, Vissers M R, et al. Effect of metal/substrate interfaces on radio-frequency loss in superconducting coplanar waveguides[J]. Journal of Applied Physics, 2010, 108(9): 093918.
[7] Martinis J M, Cooper K B, McDermott R, et al. Decoherence in Josephson qubits from dielectric loss[J]. Physical Review Letters, 2005, 95(21): 210503.
[8] Shnirman A, Schn G, Martin I, et al. Low-and high-frequency noise from coherent two-level systems[J]. Physical Review Letters, 2005, 94(12): 127002.
[9] McRae C R H, Wang H, Gao J, et al. Materials loss measurements using superconducting microwave resonators[J]. Review of Scientific Instruments, 2020, 91(9): 091101.
[10] Zmuidzinas J. Superconducting microresonators: Physics and applications[J]. Annual Review of Condensed Matter Physics, 2012, 3(1): 169-214.
[11] Gao J S, Daal M, Vayonakis A, et al. Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators[J]. Applied Physics Letters, 2008, 92(15): 152505.
[12] Wenner J, Barends R, Bialczak R C, et al. Surface loss simulations of superconducting coplanar waveguide resonators[J]. Applied Physics Letters, 2011, 99(11): 113513.
[13] Nersisyan A, Poletto S, Alidoust N, et al. Manufacturing low dissipation superconducting quantum processors[C]. IEEE International Electron Devices Meeting (IEDM), 2019.
[14] Jiang Y, Kim Y H, Zhang S B, et al. Growing extremely thin bulklike metal film on a semiconductor surface: Monolayer Al(111) on Si(111)[J]. Applied Physics Letters, 2007, 91(18): 181902.
[15] Chen W, Bennett D A, Patel V, et al. Substrate and process dependent losses in superconducting thin film resonators[J]. Superconductor Science and Technology, 2008, 21(7): 075013.
[16] Richardson C K, Siwak N P, Hackley J, et al. Fabrication artifacts and parallel loss channels in metamorphic epitaxial aluminum superconducting resonators[J]. Superconductor Science and Technology, 2016, 29(6): 064003.
[17] Mattis D C, Bardeen J. Theory of the anomalous skin effect in normal and superconducting metals[J]. Physical Review, 1958, 111(2): 412-417.
[18] Tian Y, Yu H F, Deng H, et al. A cryogen-free dilution refrigerator based Josephson qubit measurement system[J]. Review of Scientific Instruments, 2012, 83(3): 033907.
[19] Bruno A, de Lange G, Asaad S, et al. Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates[J]. Applied Physics Letters, 2015, 106(18): 182601.
[20] Macha P, van der Ploeg S H W, Oelsner G, et al. Losses in coplanar waveguide resonators at millikelvin temperatures[J]. Applied Physics Letters, 2010, 96(6): 062503.
[21] Megrant A, Neill C, Barends R, et al. Planar superconducting resonators with internal quality factors above one million[J]. Applied Physics Letters, 2012, 100(11): 113510.
[22] Shalibo Y, Rofe Y, Shwa D, et al. Lifetime and coherence of two-level defects in a Josephson junction[J]. Physical Review Letters, 2010, 105(17): 177001.
[23] Kumar P, Sendelbach S, Beck M A, et al. Origin and reduction of 1/f magnetic flux noise in superconducting devices[J]. Physical Review Applied, 2016, 6(4): 041001.