To develop useful superconducting quantum systems, the quality of qubits needs to be improved furthermore. At present, defects in materials and their interfaces are important factors affecting the coherence time of qubits. As an important part of superconducting quantum chip, microwave resonator can be used to characterize the quality of materials and the fabrication process of devices. Using molecular beam epitaxy technology, aluminum is deposited on intrinsic silicon (111) substrate to prepare the λ/4 coplanar waveguide resonators. By the preparation of silicon substrate and the deposition of high quality aluminum films, the intrinsic qualityfactor of the resonator is improved to 106 at 20 mK with the probing power at near single-photon level.