Sheng Qiming, Zheng Gang, Zhang Xiongxing, Sun Bin, Jing Liqiang, Han Yuan. Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System[J]. Laser & Optoelectronics Progress, 2021, 58(3): 3120041
- Laser & Optoelectronics Progress
- Vol. 58, Issue 3, 3120041 (2021)
Fig. 1. Angular frequency waveforms of different signals
Fig. 2. Schematic of three-channel FMCW laser interference system
Fig. 3. Control circuit of three-channel FMCW laser interferometer
Fig. 4. Schematic of laser drive circuit
Fig. 5. Circuit board for three-channel FMCW laser interference system
Fig. 6. Execution sequence of each chip program
Fig. 7. Flowchart of phase detection of beat signal
Fig. 8. Experimental device
Fig. 9. Beat signal before and after adding synchronization signal. (a) Before adding; (b) after adding
Fig. 10. Correlation of feature points before and after adding synchronization signal. (a) Before adding; (b) after adding
Fig. 11. Scatter points of displacement errors of different channels. (a) Channel 1; (b) channel 2; (c) channel 3
Fig. 12. Linearity curves of three channels
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Table 1. Routing length of each chip signal line
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Table 2. Stability test results
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