• Laser & Optoelectronics Progress
  • Vol. 58, Issue 3, 3120041 (2021)
Sheng Qiming1, Zheng Gang2、*, Zhang Xiongxing2, Sun Bin2, Jing Liqiang2, and Han Yuan1
Author Affiliations
  • 1School of Electronic Information Engineering, Xi′an Technological University, Xi′an, Shaanxi 710021, China
  • 2School of Optoelectronic Engineering, Xi′an Technological University, Xi′an, Shaanxi 710021, China
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    DOI: 10.3788/LOP202158.0312004 Cite this Article Set citation alerts
    Sheng Qiming, Zheng Gang, Zhang Xiongxing, Sun Bin, Jing Liqiang, Han Yuan. Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System[J]. Laser & Optoelectronics Progress, 2021, 58(3): 3120041 Copy Citation Text show less

    Abstract

    Aiming at the problems of harmonic crosstalk and small dynamic measurement range in traditional frequency modulation continuous wave laser interferometer displacement sensors, a three-channel displacement measurement system with three independent Fabry-Perot interferometer detection optical paths is developed. The system includes three chips, and the operation speed can be improved by using multi-chip processing. The simultaneous measurement of each chip is controlled by the equal length of the signal line and software, which can solve the problem of non-synchronization of the independent channel measurement. The experimental results show that the synchronization measurement error of each channel for a moving target with a velocity of 1 mm/s is only 0.46 nm, the standard deviation of the displacement measurement error of a 600 mm stroke is less than 3 nm, and the linear fitting coefficient is above 0.99997, indicating that this system can achieve the displacement measurement of three-dimensional moving targets.
    Sheng Qiming, Zheng Gang, Zhang Xiongxing, Sun Bin, Jing Liqiang, Han Yuan. Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System[J]. Laser & Optoelectronics Progress, 2021, 58(3): 3120041
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