Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001
- Acta Optica Sinica
- Vol. 40, Issue 20, 2005001 (2020)
Fig. 1. Structure of amplitude-tpye SOL and phase-tpye SOL
Fig. 2. Schematic diagram of diffraction focusing by SOL
Fig. 3. Distribution of axial intensity, transverse FWHM and focal spot intensity for SOL1-4. (a)--(d) Axial intensity, transverse FWHM; (e)--(h) focal spot intensity
Fig. 4. Brief manufacturing process of amplitude-type SOL and phase-type SOL
Fig. 5. Diagram of ring belt manufacturing errors: (a) Transverse error; (b) longitudinal error
Fig. 6. Focusing performance of SOL1. (a) Focal distance deviation; (b) transverse sidelobe ratio; (c) axial sidelobe ratio; (d) transverse focal size
Fig. 7. Focusing performance of SOL2. (a) Focal distance deviation; (b) transverse sidelobe ratio; (c) axial sidelobe ratio; (d) transverse focal size
Fig. 8. Calculation result of focusing field with different phase modulation. (a) Axial light field distribution; (b) transverse light field distribution of focal plane
Fig. 9. SOL2-4 focusing performance varying with phase modulation φ. (a) Spot center intensity; (b) transverse spot size
Fig. 10. Phase modulation and focused central intensity varying with the etching depth of SOL5
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Table 1. Optimized design parameters of SOL
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Table 2. Structural parameter of phase-type SOL5
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