• Acta Optica Sinica
  • Vol. 40, Issue 20, 2005001 (2020)
Tao He, Tao Liu*, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, and Shuming Yang*
Author Affiliations
  • State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China
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    DOI: 10.3788/AOS202040.2005001 Cite this Article Set citation alerts
    Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001 Copy Citation Text show less

    Abstract

    The influence of different manufacturing errors on focusing performance of large-scale super-oscillatory lens (SOL) is revealed through a quantitative study for practical use based on rigorous vector angular spectrum theory. Theoretical calculation results show that the influence of the manufacturing errors on focusing performance of amplitude-type SOL (metallic film) and phase-type SOL (dielectric layer) is the same; central position deviation mainly affects the focusing focal length, while the width deviation mainly influences the focal spot distribution; the position and width deviations within the range of ±150 nm are the maximum allowable manufacturing tolerances for each SOL ring belt. Longitudinal etching depth deviation mainly affects the focused intensity of the phase-type SOL. When the relative phase difference introduced by the etching depth is π, the focused intensity reaches its maximum. To maintain a greater focused intensity, phase modulation should be kept within the range of 0.8π--1.2 π.
    Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001
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