Resistive MEMS semiconductor gas sensors have been widely used in the fields of ambient air quality monitoring and toxic and harmful gas detection. However, due to the high power consumption, this kind of sensor is difficult to be applied to portable gas detection system. The research progress of resistive MEMS semiconductor gas sensor with low power consumption in recent years is reviewed in this paper. How to realize resistive MEMS semiconductor gas sensor with low power consumption from the aspects of gas sensing materials, sensor structure and sensor module integrated circuit are discussed. And the future development direction of resistive MEMS semiconductor gas sensor with low power consumption is prospected.