Feng Shu, Zhilei Xu, Le He, Xiaofeng Yang. Systems Engineering Methods and Their Applications in Field of Advanced Semiconductor Equipment[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922026
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922026 (2022)
![Three-dimensional structure of Hall systems engineering model[10]](/richHtml/lop/2022/59/9/0922026/img_01.jpg)
Fig. 1. Three-dimensional structure of Hall systems engineering model[10]
Fig. 2. Waterfall model
![Vee model[12]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Vee model[12]
Fig. 4. Spiral model[14]
Fig. 5. Model-based systems engineering method[15]
Fig. 6. Servo control example
Fig. 7. System integration and testing of Tangram project［20］
Fig. 8. System simulation environment of Uppaal［21］
Fig. 9. Example of DSL
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