• Acta Optica Sinica
  • Vol. 44, Issue 20, 2012003 (2024)
Chen Zhou, Xinjun Wan*, Xiaoxiao Wei, Zhenqiu Dai, and Xiaobin He
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • show less
    DOI: 10.3788/AOS240841 Cite this Article Set citation alerts
    Chen Zhou, Xinjun Wan, Xiaoxiao Wei, Zhenqiu Dai, Xiaobin He. White Light Interferometry Fitting Algorithm Based on Region‐Directed Up‐Sampling[J]. Acta Optica Sinica, 2024, 44(20): 2012003 Copy Citation Text show less
    References

    [1] Wang S Q, Chen T Q, Zhang F et al. High-precision 3D reconstruction method for topography measurement of complex mechanical parts[J]. Infrared and Laser Engineering, 51, 20210730(2022).

    [2] Guo T, Chen Z, Li M H et al. Film thickness measurement based on nonlinear phase analysis using a Linnik microscopic white-light spectral interferometer[J]. Applied Optics, 57, 2955-2961(2018).

    [3] Grübler T, Drabarek P. Interferometric measuring system for cone inspection on shop-floor level[J]. Proceedings of SPIE, 9525, 95250O(2015).

    [4] Wang X Q, Zhang T, Liang L J et al. Testing technique of polarization-coupling distribution of fiber coil and beat length of used fiber[J]. Laser & Optoelectronics Progress, 57, 230602(2020).

    [5] Taege Y, Winter T S, Schulz S L et al. Generation of biaxially accelerating static Airy light-sheets with 3D-printed freeform micro-optics[J]. Advanced Photonics Nexus, 2, 056005(2023).

    [6] de Groot P, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J]. Journal of Modern Optics, 42, 389-401(1995).

    [7] Shi L P, Wei Y B, Wei X W et al. Forming reason and correction for hysteresis nonlinearity of piezoelectric ceramics[J]. Journal of Engineering of Heilongjiang University, 4, 103-107, 112(2013).

    [8] Yao J W, Tang Y, Zhou Y et al. Design of a vertical scanning system for white light interferometers[J]. Semiconductor Technology, 42, 229-234(2017).

    [9] Tereschenko S, Lehmann P, Zellmer L et al. Passive vibration compensation in scanning white-light interferometry[J]. Applied Optics, 55, 6172-6182(2016).

    [10] Martin H, Wang K W, Jiang X Q. Vibration compensating beam scanning interferometer for surface measurement[J]. Applied Optics, 47, 888-893(2008).

    [11] Cui K H, Liu Q, Huang X J et al. Scanning error detection and compensation algorithm for white-light interferometry[J]. Optics and Lasers in Engineering, 148, 106768(2022).

    [12] Luo S J, Chen Z Y, Ding P F et al. White-light interferometry based on phase compensation in wavenumber domain[J]. Chinese Journal of Lasers, 49, 1104002(2022).

    [13] Bi S X, Duan M L, Zong Y et al. High-precision dynamic white-light interferometry[J]. Acta Optica Sinica, 42, 0512002(2022).

    [14] Chong W K, Li X, Soh Y C. Spectral effects of dual wavelength low coherence light source in white light interferometry[J]. Optics and Lasers in Engineering, 51, 651-655(2013).

    [15] Chen S, Palmer A W, Grattan K T V et al. Fringe order identification in optical fibre white-light interferometry using centroid algorithm method[J]. Electronics Letters, 28, 553-555(1992).

    [16] Kino G S, Chim S S C. Mirau correlation microscope[J]. Applied Optics, 29, 3775-3783(1990).

    [17] Selva J. Convolution-based trigonometric interpolation of band-limited signals[J]. IEEE Transactions on Signal Processing, 56, 5465-5477(2008).

    [18] Coleman T F, Li Y Y. An interior trust region approach for nonlinear minimization subject to bounds[J]. SIAM Journal on Optimization, 6, 418-445(1996).

    [19] Craymer M R[M]. The least squares spectrum, its inverse transform and autocorrelation function: theory and some applications in geodesy(1998).

    [20] Ai C, Novak E L. Centroid approach for estimating modulation peak in broad-bandwidth interferometry[P].

    [21] Zhu L L. Research on the key technologies for compact compound large-scale white light interferometry[D](2020).

    Chen Zhou, Xinjun Wan, Xiaoxiao Wei, Zhenqiu Dai, Xiaobin He. White Light Interferometry Fitting Algorithm Based on Region‐Directed Up‐Sampling[J]. Acta Optica Sinica, 2024, 44(20): 2012003
    Download Citation