Chen Zhou, Xinjun Wan, Xiaoxiao Wei, Zhenqiu Dai, Xiaobin He. White Light Interferometry Fitting Algorithm Based on Region‐Directed Up‐Sampling[J]. Acta Optica Sinica, 2024, 44(20): 2012003
- Acta Optica Sinica
- Vol. 44, Issue 20, 2012003 (2024)
Fig. 1. Structure of white light interferometry measurement system employing a stepper motor for vertical scanning
Fig. 2. Flowchart for implementing optimal hyperparameter selection using a search algorithm
Fig. 3. Principle of the morphology recovery algorithm based on region-directed up-sampling
Fig. 4. Flow chart of morphology measurement algorithm
Fig. 5. Simulated vertical scanning data. (a) Simulated scanning position; (b) scanning interval error; (c) white light interferometry image
Fig. 6. Comparison between the fitting reconstruction signal and the ideal signal
Fig. 7. Comparison of step morphology reconstructed by different algorithms. (a) Centroid method; (b) proposed algorithm
Fig. 8. Comparison of residual distribution of reconstructed surfaces under non-equidistant sampling. (a) Centroid method; (b) proposed algorithm
Fig. 9. White light interferometry image of step plates collected in the experiment
Fig. 10. Scanning position and scanning interval error of stepper motor. (a) Scanning position; (b) scanning interval error
Fig. 11. Comparison of reconstructed morphology and cross-section of standard steps by various algorithms. (a) Centroid method;
Fig. 12. Solution error. (a) Positioning error of the interpolated FFT envelope algorithm; (b) comparison of vertical profile curves solved by various algorithms
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Table 1. Comparison of solution results for a 400 nm step simulated five times by two different algorithms
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Table 2. Comparison of solution results for a 0.96 μm standard step by different algorithms
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