• Photonics Research
  • Vol. 7, Issue 8, B48 (2019)
Weizong Xu1、2、†,*, Yating Shi1、†, Fangfang Ren1, Dong Zhou1, Linlin Su1, Qing Liu1, Liang Cheng1, Jiandong Ye1, Dunjun Chen1, Rong Zhang1, Youdou Zheng1, and Hai Lu1、3、*
Author Affiliations
  • 1School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
  • 2e-mail: wz.xu@nju.edu.cn
  • 3e-mail: hailu@nju.edu.cn
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    DOI: 10.1364/PRJ.7.000B48 Cite this Article Set citation alerts
    Weizong Xu, Yating Shi, Fangfang Ren, Dong Zhou, Linlin Su, Qing Liu, Liang Cheng, Jiandong Ye, Dunjun Chen, Rong Zhang, Youdou Zheng, Hai Lu. Magnesium ion-implantation-based gallium nitride p-i-n photodiode for visible-blind ultraviolet detection[J]. Photonics Research, 2019, 7(8): B48 Copy Citation Text show less

    Abstract

    In this work, a GaN p-i-n diode based on Mg ion implantation for visible-blind UV detection is demonstrated. With an optimized implantation and annealing process, a p-GaN layer and corresponding GaN p-i-n photodiode are achieved via Mg implantation. As revealed in the UV detection characterizations, these diodes exhibit a sharp wavelength cutoff at 365 nm, high UV/visible rejection ratio of 1.2×104, and high photoresponsivity of 0.35 A/W, and are proved to be comparable with commercially available GaN p-n photodiodes. Additionally, a localized states-related gain mechanism is systematically investigated, and a relevant physics model of electric-field-assisted photocarrier hopping is proposed. The demonstrated Mg ion-implantation-based approach is believed to be an applicable and CMOS-process-compatible technology for GaN-based p-i-n photodiodes.
    J=J0exp[CqEr2kT(T0T)1/4],(1)

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    α=dln(J)dECqr2kT(T0T)1/4,(2)

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    J=J0exp(βPFE1/2kT),(3)

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    βPF=(q3πεε0)1/2,(4)

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    Weizong Xu, Yating Shi, Fangfang Ren, Dong Zhou, Linlin Su, Qing Liu, Liang Cheng, Jiandong Ye, Dunjun Chen, Rong Zhang, Youdou Zheng, Hai Lu. Magnesium ion-implantation-based gallium nitride p-i-n photodiode for visible-blind ultraviolet detection[J]. Photonics Research, 2019, 7(8): B48
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