STI-bounded single-photon avalanche diode with high photo current and low dark rate

JIN Xiang-Liang; PENG Ya-Nan; ZENG Duo-Duo; YANG Hong-Jiao; PU Hua-Yan; PENG Yan; LUO Jun

doi:10.11972/j.issn.1001-9014.2019.02.004

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