Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 14 >Issue 3 >Page 422 > Article

Optics and Precision Engineering
Vol. 14, Issue 3, 422 (2006)

Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope

^1,2, ¹, ¹, ¹, and ¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope[J]. Optics and Precision Engineering, 2006, 14(3): 422 Copy Citation Text

show less

References

[2] TERSOFF J,HAMANN D R.Theory of scanning tunneling microscopy[J].Phys Rev B,1985,31(1):805-813.

[7] COMINOS P,MUNRO N.PID controllers:recent tuning methods and design to specification[J].IEEPro Control TheoryAppl,2002,149 (1):46-53.

[9] UANG ZY,FEI R,HU ZH Q.A Smith online identification prediction control and its application in STM[C].Proceedings of 4th World Congress on Intelligent Control and Automation,Shanghai,Jun.10-14,2002:2254-2257.

[10] CHEN K S,RUMPER D L,SMITH S T.Design and control for an electromagnetically driven X-Y-θ stage[J].Precision Engineering,2002 (26):355-369.